Electric Actuator/Slider Type

Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2, L3 L2 L3 L1C Control power supply Connect the control power supply.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

162.5 139 17 Stations L1 L2 L3 L4 11 298 287.5 267 15.5 13 14 15 16 12 310.5 300 283 13.5 323 312.5 299 12 348 337.5 315 16.5 360.5 350 331 14.5 373 362.5 347 13 40

0.4

Formula: L1 = 16n + 57, L2 = 16n + 176 (For one input block.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For (Built-in one-touch fitting) C4 N3 4 L2 L1 For M5 Manual override 10 12.3 35 15.5 91.7 [96.1] 0.2 34.2 78.8 [83.2] 36.5 17 12.5 57.2 [59.4] P R P R A A A A A 31.5 56.4 [58.6] B B B B B (4.4) 2-4.5 (For mounting) (Pitch) P = 10.5 (Station 1) (Station n) 15.5 L1 L2 4.5 (Station 1) (Station n) 15.5 (Light/surge voltage suppressor) (Light/surge voltage suppressor) + + + + + + + + + + B B

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Valve mounting direction ( ) 02 2 stations Single solenoid coil is located on the opposite side of the A, B port. -: : Single solenoid coil is located on same side as the A, B port.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

wire length) 91.7 [96.1] Approx. 300 C4 N3 For (Built-in One-touch fitting) Grommet (G) For M5 L1 L2 Manual override 4 10 2-4.5 (For mounting) 10 1/8 (P, R port) 36.5 17 12.5 54.2 [56.4] 53.4 [55.6] 78.8 [83.2] P R 31.5 3.2 31.2 P R (4.4) B B B B B 32 15.3 7.5 17 16 A A A A A SV 1 (Station n) (Station 1) L1 L2 4.5 (Pitch) P = 10.5 SZ (Light/Surge voltage suppressor) 15.5 15.5 (Station n)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2, L3 L2 L3 L1C Control power supply Connect the control power supply.

VT317

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 43 Series SYJ5000 Flat Ribbon Cable Manifold [ ]: AC SS5YJ5-20PStations -00 For (Built-in one-touch fitting) N3 N7 C4 C6 Manual override L1 L2 M5 x 0.8 (A, B port)

Table of Contents

VQ1000 10 ms 200 million cycles VQ2000 20 ms Dispersion accuracy 2 ms Innovative mounting methods A valve can be changed without entirely disassembling the manifold.

3 Port Solenoid Valve Series SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Plug-in Unit

L1 79.5 6.5 P=25 65.5 72 R4.5 46 Mounting hole for 2-M5 B A B A A A B A B A B A 9 A A A A A A A 143 163 42 80 34.5 R4.5 B B 9 B B B 55.5 SI unit 10 101 Stations D-side U-side 1 2 3 4 5 6 7 8 n Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) L2 = 25n + 192 n: Stations n L L1 L2 1 131 217 2 156 242 3 181 267 4 206 292 5 231 317 6 256 342 7 281 367 8 306 392 9 331 417 10 356 442

REA/REB

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Adjustment of Cushion Effect (Smooth Start-up, Soft Stop) Caution Since the external slider and piston slider are directional for size 10, refer to the drawings below when performing disassembly or maintenance.

Nozzle Type Ionizer

Input Discharge stop signal 50 ms or more 50 ms or more The error signal can be reset by turning the reset signal on and then off. ON OFF Input Reset signal Discharge signal (on when ions are being generated) ON OFF Output ON OFF When an error occurs, the signal is turned off. Output Error signal Error occurred Ions are still generated even when the maintenance signal is turned on.

ZX

R Right side (PV port on the right side) L Left side (PV port on the left side) 02 2 B Both sides (PV port on both sides) Nil All stations 1 Station 1 only 08 8 1 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 2 EXH ports are released to atmospheric pressure in both sides.

Electric Actuator with Integrated Guide

Model Allowable Moment (Nm) Allowable dynamic moment Model Mounting orientation Load movement direction LTF6 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) Pitching 100 m a=1000 a=2000 a=3000 L1 30 20 10 0 Transfer load m (kg) L2 200 a=1000 a=2000 a=3000 Mer L2 (mm) Rolling Yawing 100 m L2 Mer 30 20 10 0 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100

Pressure Range: ISE77G (0 to 10 MPa), Piping: 02 (Rc 1/4), Orifice: None

Pressure Range: 0 to 10 MPa, Piping: Rc 1/4, Orifice: None, Unit Specification: -, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: ISE77G (0 to 10 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None, Unit Specification: M (SI Unit Only), Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m)

Series VQ Metal Seal/Rubber Seal Body Ported

L1=10.5n+14.5 L2=10.5n+25 n: Station (Max. 16 stations) Equation= Dimensions/Side entry connector [PS] (mm) Cylinder port is located at U side of body.