Pressure Range: 0 to 10 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 10 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket B, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 10 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket A, Interchangeable with ISE75[H], Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 10 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: SI Unit Only, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 10 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: SI Unit Only, Lead Wire: None, Bracket: Bracket A, Interchangeable with ISE75[H], Operation Manual/Calibration Certificate: None

Pressure Range: 0 to 10 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 10 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: None, Operation Manual/Calibration Certificate: Operation Manual + Calibration Certificate

NARM Series

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

P

Description Material 1 Body SCS14A (SUS 316) 2 Needle SUS316 L4 3 Lock nut SUS316 4 Valve SUS316 5 Valve guide SUS316, NBR for low temperature L2 L3 6 Spring SUS316 7 Bolt SUS316 8 O-ring NBR for low temperature L5 9 O-ring NBR for low temperature Model Port size D H L1 L2 L3 L4 Note) L5 Mass g MAX. MIN.

AC Servo Motor Driver (Pulse input type)

Power supply voltage is 200VAC single phase Trouble OFF ON RA MC Emergency stop MC SK (Note 6) Driver Servo motor Servo amplifier (Note 7) Controller CNP1 MC NFB 1-phase 200 to 230VAC L1 CNP3 (Note 5) U L2 U Motor V L3 V [1] M W N W P1 (Note 1) P2 PE CNP2 P [2] (Note 2) C [3] D Encoder CN2 (Note 3) Encoder cable L11 L21 [1] Provide specified power supply to input terminals L1 and L2. [2]

Vacuum

(station 4) Noter Order lett to right (station 1-10) facing tension bolt & filter cover 52 IIIZM $eri Manifold Dimensions inch (mm NZZM05-T068 ) t n: station L1 1 .73 @4\ 2.36 (60) 2.99 (76) 3.62 (92) 4.2s (108) 4.88 (124) 5,51 (140) 6.14 (156) 6.77 (172\ L2 2.20 (56) 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (1201 s.35 (136) 5.98 (1s2) 6.61 (168) 7.24 (18r'.

Title not found

R(EXH) Common SUP and EXH Valve stations 2 20 stations Optional accesory Blanking plate ass'y : DXTl70-25-1A SUP relocation ass'y : DXT170-44-'lA EXH relocation ass'y : DXI170-48lA Note: lf ther are more than 10 shlions, supply air to both sids ol maniiold and gxhaust lrom bolh sides ol manitold. How To Order,/NVV4Zl Manifold Nvv4zl ::P r =*na, acc$ory F : Mounting brackets 'A .v?

Vacuum

sggT 3 Lr 33 51 75 96 117 138 159 180 La ,15 6 al 1(F 12S r50 171 IQ 44 suction filter and silencer valve retease vatve vacuum switch (solid-state or diaphragm) Pnessune to-21iFllg (-030 mmllD. nozzle diameters for efficient aoolication. floul Incnemed by 40%. ) nozzle suction flow is 40% higher than nal designs. &Lig[tweignt. 15.5mm) width; 0.881bs. (4009f) weight.

2

L2 L2 M2 M2 KDM6 KDM Different Diameter Tee: KQ2T 2 x Applicable tubing a Applicable tubing O.D.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SS5YJ3-32, S32Station -M5 Stations L1 L2 SS5YJ3-32, S32Station -C4 3 52 44 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 20 230.5 222.5 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 Stations L1 L2 3 53 44 6 84.5 75.5 8 105.5 96.5 10 126.5 117.5 20 231.5 222.5 2 42.5 33.5 4 63.5

•

W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..

CLA

A 09 9N 9P BO (mm) Without boot With boot ,, ZZ+t+SlroItQ MM J 00 oE F GA GB GC GO GL GR J K L L2 16 32 10 85 15 26 54 10 10 M8xl.2S 6 30 71 40 500 20500 27 30 60 96 y. Y. 44 M14X l .5 M18X l .5 M\8X l .5 M22Xl.5 M26X1.5 , 50 -600 20-600 32 35 70 108 Y. Y. 52 63 !

AC Servo Motor Driver (SSCNET /H Type)

DC (Note 12) CN3 (Note 5) Forced stop 2 DOCOM DICOM 24 V DC (Note 12) Malfunction (Note 4) (Note 5) ALM CN8 RA1 (Note 9) Short-circuit connector (Packed with the servo amplifier) [1] Power supply input terminals, L1, L3: Provide specified power supply to input terminals L1 and L2. [2] Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

Vacuum Unit

Symbol Note L V V Cannot be selected when e is N L1 None V L2 V None Cannot be selected when e is P or T L3 None None 4 For the connector length other than 300 mm, order the connector assembly on page 32 separately. t Vacuum (V) port y Option5 (For details on the Function/Application, refer to page 42.)

Pressure Range: ISE71 (0 to 1.6 MPa), Piping: N02 (NPT 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70