For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f
M K J H G E Q T N P K L B AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B 71 11 50 56 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 7 4.5 20 27 25 28 0 26 13.5 4.5 2.8 40 89 114 26.5 80 83 5.5 12 33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 80 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 80 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36
For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f
O f o r e b m u N g n i t c e n n o c s e b u t h c n I h c n I h c n I c i r t e M c i r t e M c i r t e M 8 / 1 1 0 P 0 1 M D K 1 0 S 0 1 M D K 2 . 3 3 2 P 0 1 M D K 1 0 S 0 1 M D K e u l B 2 3 / 5 3 0 P 0 1 M D K 3 0 S 0 1 M D K 4 4 0 P 0 1 M D K 3 0 S 0 1 M D K 0 1 d e R 4 / 1 7 0 P 0 1 M D K 7 0 S 0 1 M D K 6 6 0 P 0 1 M D K 7 0 S 0 1 M D K 6 1 / 5 9 0 P 0 1 M D K 9 0 S 0 1 M
P L U G VQ 1 2 4 0 1 B L O C K VA LV E 23 04 06 08 01 03 07 Courtesy of Steven Engineering, Inc. !
Hexagon width across flats 12 Hexagon width across flats G 1 8 Model A 1 8 B C F: M5 x 0.8 F: M6 x 1 F: Rc K L Y E B C F: M6 x 1 F: M8 x 1.25 F: Rc K L Y D Model A E D G E D G E D G D D ZPT40B ZPT50B 34 6 8 6.2 38 5.5 5.5 13.8 10 13 12 15 5 8 16 25 25 31 40 50 43 53 51.5 47.5 32.4 19 24.4 16 48 57 ZPT10B 29 6 8 29 6.2 12 35 8.7 7.5 9.9 8.5 18.5 27.5 27.5 33.5 19 ZPT13B 16 18 20 ZPT16B 21
119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104
X60 Stroke 1 LJ1H10 Horizontal Mount Specification X60 Stroke 2 H 1 F P K 2 LJ1H10 Vertical Mount Specification Refer to Table below.
S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2
30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1
Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5
VXD2 with port size of 04 (1/2) has threads on the bottom of the body. 2 x P Port size F L K J I (D) 2 x M4 x 0.7 Thread depth 8 18 Flat terminal C 11 U E OUT T OUT IN M 2 x P Port size J K L F I (D) (mm) Electrical entry M Model Flat terminal Conduit terminal Conduit C37, Stainless steel body Port size P A B C E F I J K L D Aluminum body T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U 49.5 (55) V U
C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 Note 2) 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5 65 AR30(K)-B 1/4, 3/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2
KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 15-2-90 19 19 S Couplers Stainless Steel Type Series KKA Specifications K Fluid Water
14 43 35 1/2 52 163 15 25 to 1500 80 17 20 80 65 110 80 17 40 22 M16 x 1.5 16 44 44 3/4 65 184 18 25 to 1800 1/4 stroke 100 19 15 100 80 135 102 19 42 22 M18 x 1.5 18 44 44 3/4 75 192 20 25 to 1800 Rod series (mm) B-series rod C-series rod Bore size (mm) MM A MA D E K G H ZZ MM A MA D E K G H ZZ 32 34 M16 x 1.5 25 22 18 7 14 55 207 0.025 0.064 40 40 36 M20 x 1.5 30 27 22.4 9 19
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Basic Type ZP Series Model Connection thread Tightening torque [Nm] ZP(2 to 8)(J/K)--A8 M8 x 1 1.5 to 2.0 ZP(10 to 32)(J/K)--A10 M10 x 1 2.5 to 3.5 ZP(40/50)(J/K)--A14 M14 x 1 6.5 to 7.5 Lock ring Adapter Compact Type ZP3 Series Model Connection thread Tightening torque [Nm] ZP3-(015 to 035)JM6 x 0.75 1.5 to 1.8 ZP3-(015 to 035)KM8 x 0.75 2.0 to 2.5 ZP3-(04 to 16)(J/JB/K)Pad 2.
G B B [mm] Size Port size A B C D E F G 20 1/8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8, 1/4 47.9 28.5 53.6 38 55.2 48.9 30 1/4, 3/8 56.8 31.1 62.5 41 64.1 51.9 40 1/4, 3/8, 1/2 64.8 31.1 70.5 41 72.1 51.9 Glossary of Terms Specific Product Precautions
R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.
R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.