Table of Contents A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11
Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k Black For supply valve (,+)
45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (n = 2, 4, 6) (n = 2, 4, 6) D-H7l D-H7lW D-H7BA D-H7NF D-H7l D-H7lW D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15
type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge Round G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.
Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5
x 1.75 10 26 M26 x 1.5 40 1/2 126 216 202 Smooth Cylinder CA2Y Series Single Clevis: CA2YC G 2 x P G 2 x P G G Width across flats KA Width across flats KA 4 x J 4 x J 2 x Cushion valve 2 x Cushion valve CDH10 CDH10 MM MM REA E D D E B C B C REB Width across flats B1 Width across flats B1 AL H1 AL H1 CX CX REC N N F N N F U U A A K K C C B B Smooth Smooth H H ZZ + Stroke Z + Stroke S + Stroke
Description Material Model Color Zinc die-cast AR10-A 1 Body White Aluminum die-cast AR20(K)-B to AR60(K)-B AR20K-B to AR60K-B (Regulator with Backflow Function) AR10-A Polyacetal White AR20(K)-B to AR40(K)-B 2 Bonnet A-A Aluminum die-cast AR50(K)-B/ AR60(K)-B y A Replacement Parts [AR10-A] 2 OUT 1 I N No. Description Material Part no.
P L U G VQ 1 2 4 0 1 B L O C K VA LV E 23 04 06 08 01 03 07 Courtesy of Steven Engineering, Inc. !
115 + 30 (n 2) (n = 2, 3, 4) 115 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 3, 4) 95 + 30 (n 2) (n = 2, 3, 4) 105 + 30 (n 2) (n = 2, 3, 4) 105 + 100 (n 2) (n = 2, 3, 4) Different surfaces D-G39 D-K39 D-A3 Note 1) n 100 + 100 (n 2) (n = 2, 3, 4) same surface 1 95 115 105 80 10 35 55 Different surfaces same surface 2 110 100 85 120 35 + 30 (n 2) (n = 2, 3, 4) 85 + 30 (n 2
X70 Stroke 2 F P K A 1 2 LJ1H20 Vertical Mount Specification Dust seal specification Motor specification Refer to Table below.
D K 8 8 0 P 0 1 M D K 9 0 S 0 1 M D K KDM20 8 / 1 1 0 P 0 2 M D K 1 0 S 0 2 M D K 2 . 3 3 2 P 0 2 M D K 1 0 S 0 2 M D K e u l B 2 3 / 5 3 0 P 0 2 M D K 3 0 S 0 2 M D K 4 4 0 P 0 2 M D K 3 0 S 0 2 M D K 0 2 d e R 4 / 1 7 0 P 0 2 M D K 7 0 S 0 2 M D K 6 6 0 P 0 2 M D K 7 0 S 0 2 M D K 6 1 / 5 9 0 P 0 2 M D K 9 0 S 0 2 M D K 8 8 0 P 0 2 M D K 9 0 S 0 2 M D K Applicable Tube Material
A B M G1/2 IN OUT 2 x M4 x 0.7 Thread depth 8 2 x P Port size L K I F 18 (D) J Conduit U E 280 C (42) 45 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier T A B IN OUT M 2 x P Port size L K F I (D) J (mm) Model Conduit terminal Conduit Grommet Electrical entry Port size P A B C E F I J K L T V 1/4, 3/8 1/2 88 (93.5) 22.5 30 D M T 55.5 (61) U T 49.5 (55) U U 50 20 4.5 5
2 2 8 / 3 S 3 0 7 0 Y 2 Q K 7 1 5 . 9 2 5 . 9 2 5 3 8 / 1 S 1 0 9 0 Y 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 Y 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 Y 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 Y 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 Y 2 Q K 5 . 1 3 4 3 8 3 2 / 1 S 4 0 1 1 Y 2 Q K 2 2 5 . 5 3 5 . 6 3
With bushing K Non-rotating Width across flats 10 M8 x 0.75 (Buffer body) 22 2 2 C B M5 x 0.8 Effective thread depth 4 Model A B C Vacuum inlet direction q Pad dia.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 15-2-90 19 19 S Couplers Stainless Steel Type Series KKA Specifications K Fluid Water
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-