Description Material Model Color Zinc die-cast AR10-A 1 Body White Aluminum die-cast AR20(K)-B to AR60(K)-B AR20K-B to AR60K-B (Regulator with Backflow Function) AR10-A Polyacetal White AR20(K)-B to AR40(K)-B 2 Bonnet A-A Aluminum die-cast AR50(K)-B/ AR60(K)-B y A Replacement Parts [AR10-A] 2 OUT 1 I N No. Description Material Part no.
P L U G VQ 1 2 4 0 1 B L O C K VA LV E 23 04 06 08 01 03 07 Courtesy of Steven Engineering, Inc. !
115 + 30 (n 2) (n = 2, 3, 4) 115 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 3, 4) 95 + 30 (n 2) (n = 2, 3, 4) 105 + 30 (n 2) (n = 2, 3, 4) 105 + 100 (n 2) (n = 2, 3, 4) Different surfaces D-G39 D-K39 D-A3 Note 1) n 100 + 100 (n 2) (n = 2, 3, 4) same surface 1 95 115 105 80 10 35 55 Different surfaces same surface 2 110 100 85 120 35 + 30 (n 2) (n = 2, 3, 4) 85 + 30 (n 2
X70 Stroke 2 F P K A 1 2 LJ1H20 Vertical Mount Specification Dust seal specification Motor specification Refer to Table below.
D K 8 8 0 P 0 1 M D K 9 0 S 0 1 M D K KDM20 8 / 1 1 0 P 0 2 M D K 1 0 S 0 2 M D K 2 . 3 3 2 P 0 2 M D K 1 0 S 0 2 M D K e u l B 2 3 / 5 3 0 P 0 2 M D K 3 0 S 0 2 M D K 4 4 0 P 0 2 M D K 3 0 S 0 2 M D K 0 2 d e R 4 / 1 7 0 P 0 2 M D K 7 0 S 0 2 M D K 6 6 0 P 0 2 M D K 7 0 S 0 2 M D K 6 1 / 5 9 0 P 0 2 M D K 9 0 S 0 2 M D K 8 8 0 P 0 2 M D K 9 0 S 0 2 M D K Applicable Tube Material
A B M G1/2 IN OUT 2 x M4 x 0.7 Thread depth 8 2 x P Port size L K I F 18 (D) J Conduit U E 280 C (42) 45 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier T A B IN OUT M 2 x P Port size L K F I (D) J (mm) Model Conduit terminal Conduit Grommet Electrical entry Port size P A B C E F I J K L T V 1/4, 3/8 1/2 88 (93.5) 22.5 30 D M T 55.5 (61) U T 49.5 (55) U U 50 20 4.5 5
2 2 8 / 3 S 3 0 7 0 Y 2 Q K 7 1 5 . 9 2 5 . 9 2 5 3 8 / 1 S 1 0 9 0 Y 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 Y 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 Y 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 Y 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 Y 2 Q K 5 . 1 3 4 3 8 3 2 / 1 S 4 0 1 1 Y 2 Q K 2 2 5 . 5 3 5 . 6 3
With bushing K Non-rotating Width across flats 10 M8 x 0.75 (Buffer body) 22 2 2 C B M5 x 0.8 Effective thread depth 4 Model A B C Vacuum inlet direction q Pad dia.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 15-2-90 19 19 S Couplers Stainless Steel Type Series KKA Specifications K Fluid Water
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
58.3 70 47.8 34.3 46.6 44.1 3/8 50.8 50.8 49.6 20 JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum G: Grommet GS: Grommet with PCB F K 300 D D 300 K F C C J J E IN IN E A 2 x Port size 1(IN), 2(OUT) port B1 B B1 B 2 x Port size 1(IN), 2(OUT) port A G G 2 x M thread depth N 2 x M thread depth N CS: Conduit D F K 500 NPT1/2 C J IN E B1 B A 2 x Port
/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4 2 1/8 3/4 2 3/4 2 1/4 3/4 2 1/2 2 3/8 BORE
3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4 2 1/8 3/4 2 3/4 2 1/4 3/4 2 1/2 2 3/8
/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8
Applicable shaft type: K X = Long shaft side W1 = L1 = L3 = DShort shaft side X = W2 = Size 20, 30, 40 L2 = L4 = Y = (mm) (mm) X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 W2 L2 max Y Y Y Y Y L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 Size 10 15
Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)
Piercecon connection M8 M8 K #1 K #5 M12 M12 M12 K #2 K #4 EX500-DXPB EX500-IE3, 4 M8 QUICKON-ONE connection EX500-DXPA EX500-IE1, 2 EX500-IE5, 6 Manifold solenoid valve with input/ output unit EX600 series K #4 K #3 Auto switch Y connector p. 239 The input block reads 2 sensor signals with one port.
Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J