Model: 0 to -101kPa, Piping: ø4, ø5/32" One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: None, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: None, Made to Order: -

Model: 0 to -101kPa, Piping: ø6 One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: None, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: None, Made to Order: -

Piping: ø4, ø5/32" One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: None, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: None, Made to Order: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Model: 21 (1.8 m³/min)

Type: Fan Type, Indicator: Charged/Discharged Status / Cleaning / Error, Additional Function: Air Volume Adjustment / Error Signal Output, Air Flow/Consumption Amount(m³/min): 1.8, Ion Balance: ±5V, Ion Balance Adjusting Function: Manual, Operating Pressure Range(MPa): -, Power Supply: DC24V, Options: -, Accessories/options: ordered separately: With power supply cable (3 m), I/

2

Use to change the tube direction from One-touch fittings by 90. 353 Series KQ2 Bulkhead male elbow KQ2LE Reducer elbow P.359 KQ2L Branch Y Use to change the tube direction from One-touch fittings by 90 and to reduce size. Use to connect tubing through a panel, etc. and to change the tube direction by 90. KQ2U P.372 P.369 Use to branch a female thread.

1

P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

smcmaintenancepartslist

P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder

Table of Contents

With reduced mounting height and overall length, Low profile Low profile Compact body Compact body Lightweight Lightweight Overall length reduced by 31% Overall length reduced by 31% Weight reduced by 50% Height reduced by 29% Overall length reduced by 31% Weight reduced by 50% Weight reduced by 50% Height reduced by 29% Height reduced by 29% CY1F kg 15 25 10 Series MX CY1F CY1H MY2H 0.7

ZP

Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 119 137.5 141 6 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke

Table of Contents

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

Table of Contents

First tentative bore size determination 0.1 x Wcos + Wsin D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)

Table of Contents

KQ2UD KQ2LE KQ2VT P. 19 P. 26 P. 28 Branch universal male elbow Different dia. double union Y Adaptor Hexagonal head allows thread connection by using a box wrench. Use for branch connection. P. 26 KQ2UD KQ2N P. 19 KQ2Z Use to four-branch line in the same direction with size down. P. 28 Use to connect fitting and R female thread.

ZP

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

V100

48 R P R P R P VS Refer to page 4-4-61 for dimensions with connector cable.

Table of Contents

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY340 SY540 SY340 SY540 SY340 SY540 SY740 + + + + P. 198 EA P EB Type 41P P. 214 EA P EB In common Type 42 P. 198 + + + + + + + + EA P EB EA P EB SY340 SY540 SY740 Type 42P P. 214 EB P EA In common Type 43 SY940 + + + + P. 208 Base mounted Stacking type Flat ribbon cable Manifold stations can be increased or decreased.