5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000 Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 1314 Series VFR6000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 !1 u q t q e i e !1 i u !
40 29.4 16 35 32 23.3 16 54 50 37 16 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-32BMl 6.2 5.7 9.9 ZP3E-32BMl-P 9.9 9.4 13.6 ZP3E-40BMl 10.2 9.4 16.2 ZP3E-40BMl-P 13.9 13.0 19.9 ZP3E-50BMl 17.9 16.4 28.4 ZP3E-50BMl-P 25.5 24.0 36.0 ZP3E-63BMlZP3E-80BMl43 49.5 56 34 39 45 16.3 (Plate) 16.3 (Plate) 18 8 3
SUP/EXH block SSQ1000-PR-3-C8(-S) SUP block plate SSQ1000-B-P Blanking plug KQ2P-23/04/06/08 Dual flow fitting SSQ1000-52AC8 N9 P.44 P.45 P.46 P.42 P R D side U side Silencer (For EXH port) Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R Port plug VVQZ100-CP C6 L6 P.42 P.44 P.45 P.46 P R D side U side Individual EXH spacer SSQ1000-R-3Back pressure check valve (-B) SSQ1000-BP
(P .1190) (P .1190) (P .1190) S0700 Note) (P .1212) (P .1214) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) VQ (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) VQ4 (P .1153) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1173) (P .1175) VQ5 (P .1190) (P .1190) (P .1190
D-F7WV D-F79F D-A7H D-A80H D-F7 D-J79 D-F7W D-F7BAL D-J79W D-F79F D-F7NTL DD-M9 D-M9V D-F7V D-A7 D-A80 D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-A73C D-A80C D-A79W D-A9 D-A9V Bore size (mm) D-A7 D-A80 D-F7WV D-F9WV D-F9BAL -X D-F9BAL D-F9WV D-F9W 20Data B A B A B A B A B A B A U U U U U U U U U 12 16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18
T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.
A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .
A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .
VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .
Model A B C Y D P Q R Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C ZPY20 20 25 32 2.6 4.8 7 9 1.2 1.6 23 14 28 25 15 35 4.5 2.3 1.8 1.7 ZPY25 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 24 42 68 58 4 14.5 5 1.8 20 44 25 49.5 ZPY04U ZPY06U ZPY08U 0.8 ZPY32 14.5 24.5 42.5 68.5 58.5 N6 (Nylon tube 6/4) N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft
Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !
A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture
PG PH U D B C4, N3 C6, N7 C8, N9 1 2 Cassette base manifold: SS5V2-16 D Stations (S, R, RS) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.
1 u !0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !
(-D) When P, R port outlets are indicated on the U side, the P, R ports on the opposite side are plugged.
A: Orange B: Green U D Note) The dimensions L1 to L4 are identical to SS5X3-45F Station (P . 1-6-92).
Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made
P D Nil D side mounting None 01T, 10 1 2 Rc Rc Rc M Mixed U 01C, 01F 3 4 3 4 U side mounting For bottom ported, Rc is only available.
U U U U U U U U CQS 12 19.5 20.5 26.5 23 26 22 16 22.5 23.5 29.5 26 29 25 CQ2 20 24.5 25.5 31.5 28 31 27 25 27.5 28.5 34.5 31 34 30 MU 32 31.5 32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 41.5 37.5 30.5 32.5 30 50 41 42 48 44.5 47.5 43.5 36.5 38.5 36 63 47.5 48.5 54.5 51 54 50 40 42 39.5 80 57.5 58.5 64.5 61 64 60 50 52 49.5 100 67.5 68.5 74.5 71 74 70 60 62 59.5 Auto Switch Mounting Mount
6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.