Slider Type Ball Screw Drive/11-LEFS Series

900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510 A 16 1000 800 620 500 410 340 B 8 500 400 310 250 200 170 LEFS32 200 W /l60 (Motor rotation speed) (3750 rpm) (3000 rpm) (2325 rpm) (1875 rpm) (1537 rpm) (1275 rpm) H 30 1500 1410 1140 930 780 500 500 A 20 1000 940

Rotary Table

Mass [g] Size 10 20 30 50 70 100 200 With adjustment bolt 500 940 1230 1990 2880 4090 7580 With internal shock absorber 510 940 1230 2010 2890 4100 7650 Basic With external shock absorber Type 90 specification 600 1150 1460 2390 180 specification 570 1090 1390 2280 [g] Size 10 20 30 50 With adjustment bolt 530 1040 1350 2150 With internal shock absorber 540 1040 1350 2170 High precision

LEKF-OMZ0035

servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310 1410 940

10

MHL2 Series CAT.ES20-249A Wide Type Parallel Style Air Gripper MHL2 Series Lightweight Lightweight body by changing the body shape [g] Model MHL2-mZ MHL2 Reduction rate MHL2-10D 280 280 0.0% MHL2-16D 525 585 10.3% MHL2-20D 940 1025 8.3% MHL2-25D 1565 1690 7.4% Built-in dust protection mechanism (Standard) A scraper with a dust lip is adopted for all rod rotating parts.

Shock Absorbers and Rate Controls

940 (r.R)08 ?a I.94 r.91 1..22 r2.0 S(2rh-12t2 8t(8010 (LR)0tMlta x2&4 2.47 2.54 3.00 23.0 SQVz-12fi EXI30l2 0EMIW x 6 3.66 2.54 3.00 33.0 5(lll42rl.5xl 8K2940 {tR)0EMl.5lilxl 2.44 1.94 2.22 14.0 5(tl42rl.5x2 8(2941 (ll)0tMI.5Mx?

IDX-OM-W026

850 / 1070 810 / 940 850 / 1070 1450/1890 2000/2500 (3) A 10 15 R407C (HFC) g 42010 47010 73010 83010 55010 72010 R1 R11/2 R2 mm 10 1 2 kg 54 62 100 116 kW 22 37 55 75 1ANR 2065% 2 3 30mA 4() 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDF Series 6-1 6 1 IDX-OM-W026 6 6-3 IDF22E, IDF37E

Serial Transmission System Series EX250 Series EX500

SV1100-5FU (4 sets) U side SS5V1-W16SA1WD-06B-C6 1 set (manifold part no.)

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R L 4 5 8 10 ZZM Stations 06 6 8 10 10 ZZM Stations 06B R L 4 5 8 10 ZZM Stations 04 6 8 10 10 ZZM Stations 04B Effective area of external silencer is 160 mm2.

VQ7-6/7-8

Rc1/2 (bottom) Rc1/2 (top) Rc1/2 (both sides) Rc3/4 (bottom) Rc3/4 (top) Rc3/4 (both sides) 04D 04U 04B 06D 06U 06B Air release valve Without With air release valve Nil E Manifold specifications Piping specifications Applicable solenoid valves Manifold block size Weight kg Stations 2 (B), 4 (A) port size 1 (P), 3 (R2) 5 (R1) port size ISO size 2 VQ7-8 ISO size 2 series Max. 10 stations 0.96n

Bar Type Ionizer,, IONIZER, BAR TYPE, IZS30,31,40,41,42, 877, 970 lb

IZSE30 NO SIZE RATING, OTHERS, IZS/IZF IONIZER, 2X, IZSE30 NO SIZE RATING

IONIZER, OTHERS, IZS/IZF IONIZER, 2X, IZSE30 NO SIZE RATING, .00000 lb

IONIZER, OTHERS, IZS/IZF IONIZER, 2X, IZSE30 NO SIZE RATING, .00000 lb

Type: 40 (Standard Type), Bar Length: 820mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: Z (10m), One-Touch Fitting: ø6, Bracket: B (Bracket)

31, IZS, "IONIZER, 42" lb

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): -, Power Supply: DC24V, Options: -, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: None, Connector options: -, Model: Standard type, Bar length(mm): 1,120

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Options: -, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: NPN output, Connector options: -, Model: -, Bar length(mm): 300

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): -, Power Supply: DC24V, Options: -, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: None, Connector options: -, Model: Standard type, Bar length(mm): 1,300

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): -, Power Supply: DC24V, Options: -, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: None, Connector options: -, Model: Standard type, Bar length(mm): 1,300

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): -, Power Supply: DC24V, Options: -, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: None, Connector options: -, Model: Standard type, Bar length(mm): 340