Material: C (SS400), Number of Arranged Elements: 18, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 30 [80 (3B)], Element Type: L (Micromesh, Stainless Steel 316/Nickel Brazing Material), Nominal Filtration Accuracy: 40 μm, Element Seal Material: N (NBR)

Material: C (SS400), Number of Arranged Elements: 18, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 30 [80 (3B)], Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 5 μm, Element Seal Material: N (NBR)

AXTS-OMY0007

AXTS040*-3(B)-X2 External pilot type AXTS040*-3B-X2 External pilot valve Ratio of operating frequency and ON time AXTS040*-3(B)-X2 ON 10 OFF adjustment OFF[] Frequency [Hz] needle [rotation] 7 5 3 1 1 3 5 7 8 0.1 Hz 0.1 Hz 0.1 Hz 0.1 Hz [Hz] 1 6 2% 2% 1% 1% 2.0 Hz 2.3 Hz 2.4 Hz 2.0 Hz ON adjustme nt [Rotation] 4 Number of rotation of ON adjustment needle 3 OFF 29% 17% 15% 14% ON 2 [] 3.7

AIR CYLINDER

Auto switch operating range [mm] V(mm/s)= x1000 Operating speed of loadms 32 - 3B 5/5 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

VP3145/3165/3185

Exploded view (1) (4) (7) How to Calculate the Flow Rate (5) For obtaining the flow rate, refer to page 4-1-6. (6) (3e) (3c) (3b) (3) (3d) (9) (3a) (3e) (9) (8) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) 4-10-4 5 Large Size 3 Port Solenoid Valve Rubber Seal Series VP3145/3165/3185 Dimensions: VP3145 Grommet: VP3145-G A B V100 SY SYJ Manual override External pilot port Rc 1/4 Lead

VT317

Exploded view (1) (4) (7) (5) (6) (3d)(3b) (3c) (3) (9) (3a) (3e) i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) Comparison between the Product Model No. and the Coil Part No. Product model no.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Port size Standard size Option Exhaust cleaner for clean room VEX Model Model AN Port size Max. air flow (l/min (ANR)) Accessory Option 1 4 3 8 1 2 3 4 Port size Max. air flow (l /min (ANR)) Standard size Thread type Standard size 360 650 1,500 3,700 7,500 16,000 2 3 4 3 6 15 37 75 160 Rc NPT G 200 500 1,000 Bracket Flow direction (Right Down) With element service indicator 1 1 2 2 3B

LEC-OM02704CN

PD07 *DI3 3(CN6-3) CN6-3 PD06 000Ah 0 0 CN6-3 CN6-3 PD08 *DI4 4(CN6-4) CN6-4 PD06 000Bh 0 0 CN6-4 CN6-4 6 33 6 PD09 *DO1 1(CN6-14) CN6-14 0002h 0 0 CN6-14 CN6-14 () 00 OFF 02 RD 03 ALM 04 INP 05 MBR 06 DB 07 TLC 08 WNG 09 BWNG 0A SA 0C ZSP 0F CDPS 23 CPO 24 ZP 25 POT 26 PUS 27 MEND 38 1 PT0 39 2 PT1 3A 3 PT2 3B 4 PT3 3C 5 PT4 3D 6 PT5 3E 7 PT6 3F 8 PT7 .

LEC-OM02904

10.0 4.0 10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 7 16 7 7.7 2 2 24.5~2250Hz 2(No.PB45) ()150ms (1) 2 t t 2 2 2 2 7 17 7 (2) No.PB4522 [Hz] PB45 No.PB45 0 2 2 [Hz] [Hz] [Hz] 0 1 2 3 4 5 6 7 8 9 A B C D E F 40.0dB 24.1dB 18.1dB 14.5dB 12.0dB 10.1dB 00 01 02 03 2250 1125 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B

OMU0023

DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B

IDX-OM-Y002

current Note 6) 50/60Hz 3-phase 200V A 17.9 26.4 4.6 6.0 Power consumption 50/ 60Hz, 3 phase 200V kW 5.6 7.3 Earth leakage breaker capacity Note 7) (Sensitivity current 30mA) A 50 Cooling method of the condenser Water-cooled type Air reheater / after cooler Second class pressure vessel Refrigerant R407C (HFC) Amount of refrigerant to be filled kg 2.25 4.5 Auto drain ADH4000-04 Port size 80A (3B

Please contact us for the latest version.sales@ocaire.com, MAINLINE FILTER, AIRLINE EQUIPMENT, AFF MAIN LINE FILTER, MB, AFF 3 FLANGE STANDARD (PT), 114.40000 lb, ModelRated flow Note)(l/min (ANR))Port sizeMass (kg)AFF125A2200080(3B)JIS 10K FF flange52

Please contact us for the latest version.sales@ocaire.com, MAINLINE FILTER, AIRLINE EQUIPMENT, AFF MAIN LINE FILTER, MB, AFF 3 FLANGE STANDARD (PT), 117.41962 lb, ModelRated flow Note)(l/min (ANR))Port sizeMass (kg)AFF125A2200080(3B)JIS 10K FF flange52

Please contact us for the latest version.sales@ocaire.com, MAIN LINE FILTER, AIRLINE EQUIPMENT, AFF MAIN LINE FILTER, MB, AFF 3 FLANGE STANDARD (PT), 132.27735 lb, ModelRated flow Note)(l/min (ANR))Port sizeMass (kg)AFF125A2200080(3B)JIS 10K FF flange52

/OTHER), 462.50848 lb, ModelRated flow (l/min (ANR))Port sizeMass (kg)AMF9002400050(2B), 80(3B),100(4B)JIS10K FF flange200

Size: 3B (Tubing: 3/8" x 1/4", Piping: ø21.3 x ø15.4)

Fitting Type: H (Straight), Size Combination: 3B (Tubing: 3/8" x 1/4"; Thread: 1/4"), Piping Type: M (Male)

Fitting Type: T (Union Tee), Size Combination-A Side: 3B (Applicable Tubing Size 1/4" x 5/32"), Different Diameter-B Side: Same Diameter (B Side), Packaging: 1 (Standard Packaging Equivalent to Class M5.5)

Fitting Type: U (Union), Size Combination-A Side: 3B (Applicable Tubing Size 1/4" x 5/32"), Different Diameter-B Side: Same Diameter (B Side), Packaging: 1 (Standard Packaging Equivalent to Class M5.5)

Fitting Type: H (Straight), Size Combination: 3B (Tubing: 3/8" x 1/4"; Thread: 1/4"), Piping Type: M (Male), Thread: N (NPT), Packaging: 3 (Packaging Equivalent to Class M5.5 w/PVDF Nut)