Battery-less

3 i e !5 r t w q y !6 !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Use the Valve for Vacuum Applications (When used as a 3 port valve) Caution Application example of VQD11 1 V W 2 3 5 VQC (Symbols used are typical examples.)

Air Cylinder NCA1 Series

3 10 5/8 1 3/4 2 1/4 12 3 12 3/4 1 3/4 2 1/4 14 3 1/2 14 3/4 1 1/4 3/4 2 3/4 BORE ROD KK A B V W Y ADD STROKE/2 (MM) SM XI 8 1 3/8 1-14 1 5/8 2 1/4 7/8 2 13/16 4.438 BORE J K TD TL TM 8 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/16 4.688 8 1 1/2 9/16 1.375 1 3/8 9 3/4 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 4.813 10 2 11/16 1.750 1 3/4 12 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5.063 12 2

HRX-OM-Q026

HRSH100-W*-20-*T HRSH150-W-20-*T HRSH200-A-20HRSH200-W-20R8-5 M5 30 3 phase 40 4 cores x AWG8 200 to 230 (4 cores x 8 mm2) VAC *including (60Hz) HRSH250-A-20HRSH250-W-20HRSH300-A-20ground 50 HRSH100-A-40HRSH100-W-403-phase 20 R5.5-5 380 to 415 HRSH100-W*-40-*T HRSH150-A-40HRSH150-W-403 x 5.5 mm2 VAC For power (3 x AWG10) (50/60Hz), line M5 30 3-phase 30 HRSH200-A-40HRSH200-W-40R14-5 460

0.4

e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2)

CRB2/CRBU2/CRB1

Y (mm) 10 3 Y1 2 to 8 Size D1 L1 max. X 15 Y1.5 3 to 9 3 to 4 C1 C2 Y = L2 = L1= 10 3 X1 2 to 14 20 Y1.5 3 to 10 3 to 5 15 X1.5 3 to 18 3 to 4 D2 = 30 Y2 3 to 13 3 to 6 C2 = C X = 20 X1.5 3 to 20 3 to 5 40 Y4.5 6 to 15 3 to 8 30 X2 3 to 22 3 to 6 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round shaft with male threads.

High Vacuum Angle Valve

(Including w, r, t, u, i, o, !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W W W Dynamic Moment Moment generated by the load equivalent to impact at the stroke end Guide central axis We = WV V = 1.4 Va Average load coefficient Pitch moment Me1 = 1/3. We L Yaw moment Me3 = 1/3.

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

ZP

Form w 1 Material E Y 10 10 12 3 8.2 6.5 1.5 13 13 15 7 2 16 16 18 20 20 22 4 10.2 8.5 3 25 25 28 32 32 35 9 40 40 43 10 26 13 5 50 50 53 8 14 6 N S U F GN GS C A ZP F B Flat, Ball Joint Type Construction p. 119 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Mounting Bracket Assembly From p. 127 With adapter 10 to 50 F w q ZPT

Best Pneumatics Vol. 14

in imperial units (PSI, F) F (2) G W AFD30/40 AF Note 3) Bracket is not assembled and is supplied loose at the time of shipment.

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

AC

Example) 26NW 01 11 21 31 41 q w e w q Note 3) Only adjusting spring of regulator is different from standard specification. Note 4) Without valve mechanism. q q q w w w e (1) Numbers in . indicate order of constructtion of equipment from left hand side (the upper stream side) from a view of front side. Ex.)

Modular F.R.L. Unit

Note 3) For thread types M5 and NPT. Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

Rotary Actuator

3 @8 @7 @5 @4 e t !4 !1 i !0 !2 q w o r With air cushion Without air cushion With auto switch !9 @1 @3 !7 !6 !8 @0 @2 Component Parts No.

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible