2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation
3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.
symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 4 (A) JIS symbol 3 position closed center (A) 4 (B) 2 2 (B) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center with back pressure check valve 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 3 position closed center/exhaust
. 2. 2. 2. 50% 50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4
7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.
Fig.1 Fig.2 Fig. 3 Protrusion of junction box B Fig. 2 Clip in. Fig. 3-A When ordering ejector for vacuum pump system, spacer is included.
CE*-OMQ0013-F / / 1 7 1-1 1-2 1-3 1-4 8 2-1 2-2 2-3 13 3-1 3-2 3-3 15 4-1 4-2 4-3 17 5-1 5-2 5-3 21 6-1 6-2 22 7-1 7-1-1 7-1-2 7-2 7-2-1 7-2-2 7-3 7-3-1 7-3-2 7-3-3 INPUT 7-3-4 OUTPUT 7-3-5 7-3-6 28 36 9-1 9-1-1 9-1-2 9-1-3 9-2 9-2-1 9-2-2 9-3 9-3-1 45 10-1 10-2 46 11-1 11-2 50 12-1 CE2/CEU2 / *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power
30 6 10 1/4, 3/8 =0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1500 2000 2500 3000 12 16 20 24 1/4,3/8 3/8 3/8 3/8 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] 40 8 10 1/4, 3/8 500 6 40 =0.7 30 40 1000 1500 2000 2500 3000 3/812 3/812 3/812 3/812 3/812 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Since the cushion capacity may be exceeded in high speed, high load operation, confirm the maximum
3 !2 !7 !6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.
S FV4 FV4 M 571 2PW 050 Size Code Cv 0.29 0.5 Metered flow 3 4 Metered adjusted flow in slpm Code Metered adjusted flow in slpm at 80 psig (0.55 MPa) N2.
3, 4, 5) 20 + 35 D-M9V 5 20 35 CHS (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9V 5 15 25 CH2 (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 10 20 35 CHA (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 15 + 45 (n 2) 2 D-H7/H7W D-H7NF/H7BA 60 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 60 Related Products (n = 2, 4, 6) Note 3) 15 + 45
/6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() 7 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -66No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 210 g 260 g 410 g 720 g 890 g 285 g 335 g 530 g 860 g 1075 g 310 g 360 g 610 g + 385 g 435 g 730 g +85 g 171 3mPas(3 cP) 20.5 s 3F.S. 374 4OFF (2 5 ) 5 100
3-wire (PNP) 2-wire 12 V 3-wire (NPN) IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 12 V 3-wire (NPN) IC circuit 5 V,12 V 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 A96V A93V2 A96 A93 A90 Z76 Z73 Z80 3-wire (NPN) IC circuit 5 V Yes Grommet 100 V Relay PLC 2-wire A90V 24 V No 12
Step 3) Slide the auto switch in the direction of the arrow until the indicator light illuminates. Step 3) Slide auto switch in the direction of the arrow until the indicator light illuminates. Move the switch further 0.3 to 0.5 mm in the direction of the arrow and fasten it.
POWER FLOW -27No.PF-OMN0009CN-F () PF3W504 PF3W520 PF3W540 PF3W511 PF3W521 (3 mPas(3 cP)) 1 0.54 L/min 216 L/min 540 L/min 10100 L/min 50250 L/min 070 090 () ( ) 3F.S. 2F.S. 5%F.S.(25 ) 2 2 3 1 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 () DC1224 V10 30 mA IP65 050 () 3585R.H.() 4 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2
point) Port size Rc 1/2, 3/4 3/4, 1 1/2, 3/4, 1 Material Housing/Seal SUS304/NBR or FPM Element Note) Cotton, PP, SUS304, SUS316, etc.