CQ2

l X 140 l M6 X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 120 l X 145 l M8 X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 125 l X 150 l M10 X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 130 l X 155 l M10 X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 100 l X 105 l X 140 l X 165 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3

Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Table of Contents

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Table of Contents

mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

Table of Contents

15 10 0 0.01 0 0.1 10 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (15) V = Over 400 mm/s; Up to 50 st Graph (16) V = Over 400 mm/s; Up to 75 st 2 2 CXSM CXSL CXSM CXSL 1 1 0.5 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 0.05 20 20 15 15 10 0.01 0 0.01 10 20 40 60 80 100 0 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (17) V = Over 400 mm/s; Up to 100

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3.2 14.5 VP4 36 (45) S0700 (4.9) (37) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) VQ VQ4 (40.2) 12.7 40.4 (36.7) 28.1 [35.1] 20.5 + VQ5 VQC 15 0.8 (20) 1.6 VQZ For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 SQ VFS VFR M plug connector (M): DIN terminal (D, Y): M8 connector (WO): L plug connector (L): SY5 20-L(-F2) 3 4 5 SY5 20-M(-F2) 3 4 5 SY5

V100

L dimension 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No. 20 260.5 L dimension 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No.

Smooth Cylinder/Low Speed Cylinder

Z + Stroke TZ Clevis style: CG1YD 20 to 63 TT CZ C 0.1 RR L 8 x J Clevis Style (mm) CD hole H10 Axis d9 Bore size (mm) V RR L CZ CX CD C 0.1 20 25 32 40 50 63 80 100 26 32 11 13 15 18 20 22 18 22 14 16 20 22 25 30 35 43 29 33 40 49 60 74 56 64 28 32 8 10 12 14 16 18 18 22 ZZ + Stroke Z + Stroke TZ (The above shows the case port location is changed by 90.)

Table of Contents

(l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 80 80 80 80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure Vacuum pressure 60 60 60 60 60 60 Air consumption Air consumption 40 40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3

Air Slide Table

30 40 0.0 0 10 20 50 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXQ8( )-10, 20Z MXQ8( )-40Z A C A C 1.2 1.2 V = mm/s V = mm/s 1.0 1.0 Load mass m [kg] Load mass m [kg] 0.8 0.8 V = 50 V = 150 V = 150 V = 50 0.6 0.6 V = 100 V = 100 V = 200 V = 200 0.4 0.4 0.2 0.2 0.0 0.0 0 10 20 30 40 0 10 20 30 40 50 60 Allowable overhang L [mm] Allowable overhang L [mm] MXQ8( )-50Z A C 1.2

MY1

MY1B (Basic type) B A 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 6 MY1M (Slide bearing type) B A 16 20 Mounting position A 90 70 B 110 90 Operating range l Note) 7.5 11 MY1C (Cam follower guide type) B A 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 27 35

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXS M6 x 1 7.4 13 LXS M6 x 1 7.4 20 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body. Caution 2. Through holes 2.

Air Cylinder

Double end lock: CBG1BN Bore size Stroke Wl (mm) Bore size (mm) S ZZ 20 92 129 25 92 134 32 91 133 40 101 153 50 119 179 63 119 179 80 146 220 100 146 220 ZZ + Stroke S + Stroke With rod boot 8 l 8 l 8 l IJ IJ e e JH f h + l f JW h + l ZZ + l + Stroke ZZ + l + Stroke 20 to 63 80, 100 (mm) (Reference) l Head end lock: -Hl Rod end lock: -Rl Double end lock: -Wl ZZ ZZ ZZ 20 30 18 55 27 15.5

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

+ l (179 + l) 56 63.5 14 6.6 40 49 22 30 4.5 58.4 30 71.4 18 10 40 Up to 500 CD-G04 (207 + l) 225 + l 173 (185) 205 (217) 193 + l (205 + l) 64 79 16 9 50 60 36 6 72.4 36 86 25 20 20 50 Up to 600 CD-G05 (237 + l) 235 + l 178 (190) 215 (227) 198 + l (210 + l) 74 96 18 11 60 8 90.4 46 46 105.4 74 30 22 20 63 Up to 600 CD-G06 (247 + l) 281.5 + l 214 (228) 272.5 (286.5) 223 + l (237 + l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

flange style: CBQ2G/CDBQ2G With head end lock With rod end lock Standard stroke Bore size (mm) A B L L1 A B L L1 10, 15, 20, 25 73.5 61 4.5 18.5 67 54.5 4.5 18.5 FV 20 50, 75, 100 88.5 66 14.5 28.5 88.5 66 14.5 28.5 10, 15, 20, 25 77 64 5 22.5 70.5 57.5 5 22.5 25 50, 75, 100 92 69 15 32.5 92 69 15 32.5 2-FD A + Stroke B + Stroke L FX FZ FT Standard stroke Bore size (mm) FD FT FV FX FZ 20

Made to Order

F L K P Q S SS Z ZZ CXWL20-225 116.5 239 42 90 564 227 323 550 578 CXWL20-250 264 42 90 614 252 348 600 628 129 CXWL20-275 141.5 289 42 90 664 277 373 650 678 Model F L K P Q S SS Z ZZ CXWL32-225 41 277 30 255 584 227 337 564 604 CXSJ series: 10 M L CXSJ series: 15, 20, 25, 32 M L Stroke Stroke ZZ ZZ SS SS Z Z K CXSJ 10 M L CXSJ 15 M L CXSJ 20 M L CXSJ 25 M L CXSJ 32 M L Model Stroke SS

Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

SY

41 Type 42 Type 43 Type 41P Type 42P Type 43P Type 45 3 port valve Air operated 3 4 5 3 4 5 M type plug connector (M): SY3 20-ML type plug connector (L): SY3 20-LC4 C6 C4 C6 Grommet .SS5Y31, #3 L type plug connector .