Vacuum System Peripherals: R L B 01 1 Nil F G Rc 1 8 ... ...
(Excludes when the stroke exceeds 2000 mm) Table Displacement (Reference Value) 0.08 EQFS32 (L = 30 mm) W L EQFS40 (L = 37 mm) 0.06 Displacement [mm] EQFS25 (L = 25 mm) 0.04 EQFS16 (L = 20 mm) 0.02 0 0 100 200 300 400 500 Load W [N] This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Check the clearance and play of the guide separately.
L J Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.
L M Nylon Urethane M5 X 0.8 Tube O.D.
If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.
Refer to the each kit dimensional drawing for L dimension. VS VS7 (mm) L=12.5 X n+10.5 L dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No.
Table Displacement (Reference Value) L W 0.02 LEJ40 (L = 52.5 mm) LEJ63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.
to 25, CH2: CH1 + 0 to 15 Cooling capacity (CH1, 2 total) 50/60 Hz*2 kW 4.8/5.8 Heating capacity (CH1, 2 total) 50/60 Hz*3 kW 1.3/1.6 Temperature stability*4 C CH1: 0.1, CH2: 0.5 Circulating fluid system Rated flow 50/60 Hz*5 L/min CH1: 21/26, CH2: 2/2 Max. flow rate 50/60 Hz L/min 29/38 Max. pump head 50/60 Hz m 34/50 Min. operating flow rate 50/60 Hz*6 L/min CH1: 15/15, CH2: 1/1 Tank capacity
[ ] for AC L plug connector (L): SYJ3l2-lLll-M3 M plug connector (M): SYJ3l2-lMll-M3 44.9 28 12.7 28 12.7 A 8.2 2 A 8.2 2 2-1.8 7.4 7.1 (Mounting holes for manifold) 2-1.8 7.4 7.1 (Mounting holes for manifold) (Lead wire length) 300 300 (Lead wire length) 28 [34.5] 39.1 [45.6] 28 [34.5] 20 15.6 13.5 15 20 9 13.5 15 9 58.5 48.9 [50.2] [ ] for AC Other dimensions are the same as the grommet
L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17
Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 8 Hexagon width across flats 12 Hexagon width across flats 8 H: M5 x 0.8 H: M6 x 1 Model A B D K L Y C G F F C G H: M6 x 1 H: M8 x 1 D E Model A B C K L Y E F E F ZPT40B 40 50 43 53 24.4 32.4 48 57 3 15 4.5 ZPT50B 34 38 ZPT10B 10 13 12 15 5.5 8.7 13.8 19 20 25 ZPT13B 16 18 40 44 66 70 25 56 60 16 19 16 18.5 20 21 23.5 25
Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150 133
L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.
48.5 63.6 25 89.5 79.5 10 15 ZPR40D 40 43 29 42.5 53.3 71.1 25 97 87 17 15 A P P L I C A B L E T U B E A P P L I C A B L E T U B E Applicable Tube OD P Q R S Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 6 6 24.3 16.8 12.8 H O W T O O R D E R Z P R P A D H O R I Z O N T A L T Y P E W I T H O U T B U F F E R 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 8 8 26.2 18.7 15.2 ZPR P A D D I A M E T E
Operation Range ( l Dimension) (mm) Bore size Actuator series 15 9 16 20 25 32 10 8 7 6 5.5 5.5 CDJP-lD Without shield plate With shield plate 9 7 11 8 12 8 14 9 CDU Note) Average value at normal temperature including hysteresis.
0 0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) a CX B C d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM A +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 12 10 21 18 25 14 9.5 M8 x 1.25
No. 11 12 13 14 15 16 17 18 19 20 Exploded View y VVQ1000 51A C8 L Dimension 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 Port size L Dimension 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 C8 8 One-touch fitting N9 5/16" One-touch fitting No. 31 32 33 34 35 36 37 38 39 40 L Dimension 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 33 Exploded
16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30, 35,
21 17.46 17.46 17.46 17.46 22.23 25.4 17.46 17.46 17.46 17.46 22.23 25.4 2.5 13.5 36 36 34 34 52 96 125 128 Applicable tubing 5 32 3 16 1 4 5 16 3 8 13.5 15 15 20 23 3 3.5 4.6 6 7 15 10 14.5 15 14.5 14 18 9 16 -18 9 16 -18 3 4 7 8 1-12 1-12 -14 -16 K 1 2 22 28.6 28.6 26 9.6 M H Nipple: KQ2N D d L M Weight (g) 1 8 3 16 1 4 Applicable fitting Model D 2-Applicable fitting KQ2N01-99 36 15.5
Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.