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08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 AMJ 5/16" ZFC201-09 Misc.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

VM

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

Air Fittings & Tubing

Thread R(PT) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 64 65.5 67.5 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 8 4 KM14-04-08-01S-3 30 38 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5

VM

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

Speed Controller with Indicator

-04 4 8.2 AS221FS-G02-06 6 10.4 23.4 32.7 AS221FS-G02-08 8 13.2 23.9 33.2 14.2 27 AS221FS-G02-10 10 15.9 26.9 36.2 15.6 28 AS321FS-G02-06 6 1/4 17 13 13.3 10.4 21.8 33 36.4 63.1 61.7 54.6 53.2 24.5 28.5 9.3 19.2 55 AS321FS-G02-08 8 13.2 22.7 33.9 14.2 AS321FS-G02-10 10 15.9 26.7 37.9 35.7 15.6 57 AS321FS-G02-12 12 18.5 29.7 40.9 34.5 17 59 AS321FS-G03-06 6 1/4 21 16.6 45 AS321FS-G03-08 8

Micro Mechanical Valve Series VM1000

.) 5.5 mm T.T. 2.0 mm O.T. 3.5 mm P.T. 30 N F.O.F. 3 x 18 4 x 4.5 mounting hole VM VM Toggle lever VM430-01-08 T.T.

Vacuum Unit

12.3 Suction filter 38.5 16.5 A 15 4 Vacuum (V) port 78.8 V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 4 Refer to page 38 for dimensions with a mounting bracket.

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

ZP

Pad diameter (mm) 4010 3507 2004 4 x 10 3.5 x 7 2 x 4 Vacuum entry port (Refer to Table (3) for applications.) 02 04 2 4 6 8 10 13 16 20 25 32 40 50 ZX 06 08 10 13 16 20 25 32 40 50 Buffer stroke (Refer to Table (2) for applications.)

Table of Contents

4 !

VM

Toggle Lever/VM1000-4N-08, VM1000-4NU-08 VM1100-4N-08, VM1100-4NU-08 JIS Symbol/2 port 3 port Panel mounted hole Applicable tube 0.5MPa supply T0425 TU0425, T0403, TS0425 Side piping 3 ports 2 ports VM1100-4NU-08 VM1000-4NU-08 VM1100-4N-08 VM1000-4N-08 4N F.O.F. 40 P.T.

V

P L U G VQ 1 2 4 0 1 B L O C K VA LV E 23 04 06 08 01 03 07 Courtesy of Steven Engineering, Inc. !

F

8 KQR04-08 10.4 36.5 18.5 16 5.6/5.6 5/32 6.3(1/4) KQR03-07 11 36 19 16 3 4 10 KQR04-10 12.8 39.5 18.5 16 5.6/5.6 3/16 6.3(1/4) KQR05-07 12 39 22 16.5 3.5 6 4 KQR06-04 12 37.5 21.5 17 4/4 3/16 8(5/16) KQR05-09 12 38 19.5 16.5 3.5 6 8 KQR06-08 12.8 37 18.5 17 13.1/13.1 1/4 8(5/16) KQR07-09 14 41.5 23 17 4.6 6 10 KQR06-10 12.8 39.5 18 17 13.1/13.1 1/4 9.5(3/8) KQR07-11 14 40 20 17 4.6 6 12

Series VQ Base Mounted Metal Seal/Rubber Seal

Terminal blocks Manifold 1 row 1 to 4 stations 2 rows 5 to 8 stations How to Order Manifold VV5Q 08 C6 12 2 D T Option Symbol Option VQ0 VQ1000 (2) Check valve for prevention of back press. B (3) DIN rail mounting D (4) Series/Manifold Special wiring spec.

CG5-S

(mm) Applicable fitting size 6 8 10 4 8 10 12 10 12 12 16 16 KGE10-02 R 1/4 Model 10 -03 R 3/8 KGR04-06 KGE12-03 R 3/8 12 4 -08 -04 R 1/2 -10 KGE16-03 R 3/8 16 KGR06-04 -04 R 1/2 -08 6 Tube Cap KGC -10 -12 KGR08-10 Applicable tubing O.D.

ZP

dia. 1 02 to 08 2 10 to 16 Lock ring 3 20 to 32 4 40, 50 Pad N6 A8 4 ZP Y Pad [q Type Y adaptor] With buffer ZP 50 K20 Y A14 U6 UGN [Pad model no.]

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

SQ1000/2000

Note 4) Values for the low wattage (0.5W) specification. (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 4 position dual 3 port valve (A) 4 2 5 3 1 N.C. N.C. 4 position dual 3 port valve (B) 4 2 5 3 1 N.O. N.O. 4 position dual 3 port valve (c) 2 4 5 3 1 N.C.