Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance AS1001FG AS2001FG AS2051FG AS3001FG AS4001FG Model 3.2 6 8 10 12 4 6 6 8 10 Metric size 4 12 Tubing 6 Flow Direction Symbols on Body O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" Indication symbol Symbol Inch size 5/32" 1/4" 5/16" 3/16" Flow rate (L/min (ANR)) 100 130 230 290 460 420 660 920 1050 1390 Controlled flow Free flow Sonic conductance

SV

With External Pilot Specifications (Pitch) 20.5 15.8 9.5 17.5 P = 16 11.9 9.2 25.2 11.8 5.4 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16

JXCx-OMT0061CN

INP 1 2 CC-Link CC-Link * 6 - 2.2 LE C P MJ (LE ) LEFS16B-100B-S1MJS P (DC24V) [LEFS16B-100] MJ CC-Link D DIN S T T <> LEHZ10K2-4 7 - 2.3 *1 CC-Link *4 PLC *3 LEC-CMJDC24V CN5 *1 *2 CN4 LE-CP-LE-CP---S CN3 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 *3 DC24V USB A-miniB type CN1 <> ( 2) AWG20 (0.5mm (3m)

2/3 Port Valve

P P Model Solenoid coilO Orifice size (mm) Model Port size Rc(PT) Coil: Class B, Class H VX311 0 2 4 1 8 1 4 , 1.5 VoltageO 2.2 VX312 0 2 4 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V , 1 8 1 4 3 VX313 0 2 4 , 1 8 1 4 DC Standard Option 24V 12V 3 VX3234 2.2 VX3224 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 4 VX3244 MaterialO 2.2 VX3324 3 VX3334 Body Seal Brass, Stainless

REC

(Refer to p.4.9-5) Caution Model Recommended SMC speed controller Caution Model Elbow Straight In-line REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC32 AS3201F-01-08-X214 AS3001F-08-X214 AS3201F-01-08-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 4.9-3 Be sure to read before handling.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Mechanical Valves Series NVM, NVFM, NVZNI

in Parentheses .Series NVM MECHANICALLY ACTUATED/PI LOT OPERATED DIMENSIONS NVZM4sO NVZil450-N010 ,^. fl cP 1 ll\_/ tl i i M A X P Panel lvlounting 9 F 4.63 lbs. (2.1 Ko) j. l 0 17 in. (4.4 mm) O T 0 08 in. (2.0 mm) 0.25 in (6 4 mm) '75 PSIG (5 Kgf/cmz1 A E (.; u E G H K M N P 5.66 143 9 4.39 r 1 1 4 ) 1 '18 't 28 32 5) ) 0 6 1 s ) 012 (3) 080 204 1 5 4 (39) o 7 1 (18) 1 2 6 (321 1 4 2

IIIIIII

in Parentheses .Series NVM MECHANICALLY ACTUATED/PI LOT OPERATED DIMENSIONS NVZM4sO NVZil450-N010 ,^. fl cP 1 ll\_/ tl i i M A X P Panel lvlounting 9 F 4.63 lbs. (2.1 Ko) j. l 0 17 in. (4.4 mm) O T 0 08 in. (2.0 mm) 0.25 in (6 4 mm) '75 PSIG (5 Kgf/cmz1 A E (.; u E G H K M N P 5.66 143 9 4.39 r 1 1 4 ) 1 '18 't 28 32 5) ) 0 6 1 s ) 012 (3) 080 204 1 5 4 (39) o 7 1 (18) 1 2 6 (321 1 4 2 (

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

Suction Guard (Produced upon receipt of order) FHG Series

(08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 1/2 3/4 1 1 1/4 1 1/2 2 78 78 83 106 106 111 3.6 3.6 3.6 6.4 6.4 6.5 71 71 71 104 104 104 53 53 53 74 74 74 3.7 3.7 3.7 7.4 7.4 7.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

Connection: Insert Fitting, Connection Size: 10 (Insert Fitting Ø10), Nozzle Diameter: 100 (Ø1), Number of Holes: 4 Holes

Connection: R (Male Thread), Connection Size: 01 (R1/8), Nozzle Diameter: 100 (Ø1), Number of Holes: 4 Holes

Connection: R (Male Thread), Connection Size: 02 (R1/4), Nozzle Diameter: 100 (Ø1), Number of Holes: 4 Holes

Types: Nozzle, Nozzle Shape: Standard, Features: Quiet, Nozzle Connection Port Type: Swaged, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Connector size: ø10, Nozzle Length(mm): 24, Nozzle Diameter(ø): 1