Series: Belt Drive, Size: 32, Motor Mounting Position: Top Mounting Type, AC Servo Motor: 200W Output, Absolute Encoder, Lead: S, Stroke: 300mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: Standard Cable, Cable Length: 5m, Driver: LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card, I/O Connector: w/Connector

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Key Key +4 0 0 0 +4 0 9 y 9 A port B port 0 y A port B port a a w 0 w 1 y y e ay e k k 80 w of of y e e ke 1 g g n n f ay ra a o r n n w ge io io at ey n ot at R ra ot k R Angle adjustment range 3 n of io at e +4 0 ot R ng R ot ra at n 80 io io at 1 n ot R ay ra +4

IP80-OM00019

) 9 4. 23 10 A * 3-1-2 3 2 IP8000 OUT2 OUT1 () * OUT2 OUT1 * 11 A * 3-2-3 DA RA DA RA 3 IP8000 OUT1 OUT2 RA DA OUT1 OUT2 * * 12 5. 5-1 2M4 M4 (1) (+)(-) (+) (-) G1/216.5mm (2.636.64 mm2) (2) 14A B( B), M4 14 5-2 (1) (+)(-) (+) (-) G1/220mm G(PF)1/2 (0.51.5mm2) M4 (2.636.64mm2 ) 15 13 6.

CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

CLQ

With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10

CLQ

RB 2 x 4-0 threads RA RB Standard type (through hole): CLQB63/80/100 Extension locking LOCK Approx.

Compact Cylinder with Lock Series CLQ

RB 2 x 4-0 threads RA RB Standard type (through hole): CLQB63/80/100 Extension locking LOCK Approx.

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole type)/RQB, RDQB Double end tapped type: RQA, RDQA Double end tapped RA RA mm OA threads Bore size (mm) RA OA 32 40 50 M6 x 1.0 10 M6 x 1.0 10 M8 x 1.25 14 H effective thread depth C 2-P (port size) 4-N through Approx.

Electro-Pneumatic Positioner Series IP8000/8100

Main shaft Double action actuator OUT2 Main shaft Single action actuator OUT1 OUT2 OUT1 SUP The cam of the positioner should be set on the RA surface. SUP SUP The cam of the positioner should be set on the RA surface. The cam of the positioner should be set on the RA surface. IN + IN + IN + OUT1 is plugged.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Smooth Cylinder Series CQSY

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

AP64

Check Valve Series AP64 Simple design with free of springs and poppets Reseals with minimal back pressure Low cracking pressure How to Order (Inlet) (Outlet) AP64 MV4 MV4 S Material Seat material Body material 316L SS secondary remelt Code Code Material FKM (Standard) CR S No code NP Surface finish Connections (Inlet, Outlet) Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25

Size: 40, Motor Type: S6 [AC Servo Motor (Absolute Encoder) 100W], Stroke: 300mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 10m, Driver Type: -, I/O Connector: -

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 300mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 10m, Driver Type: -, I/O Connector: -

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 300, Max. Transportable Mass Range (Horizontal)(kg): 10.1 to 20.0, Max.