Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 16mm, Size 63: 20mm, Stroke: 800mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 10m, Driver Type: -, I/O Connector: -

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: T8 (400W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 800mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable, Flexible Cable), Cable

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: 400W Output, Absolute Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 800mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Robotic Cable, Flexible Cable, Cable Length: 10m, Driver

Series: Ball Screw Drive, Accuracy: High Precision Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator Cable

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

CQ2

(mm) Standard stroke range Bore H A 115 115 125 B 83 83 91 C (2) D 36 36 40 E 142 158 178 I 190 210 238 J 11 10 10 K 32 32 36 L 16 16 17 M 114 128 144 N 12.5 12.5 14.5 OA OB 21.2 21.2 24.2 Q 24.5 24.5 27.5 RA 25 25 28 RB 18.4 18.4 21.2 S 162 177 197 U 80 88 98 125 140 160 30(22.5) 30(22.5) 33(26.5) M22 X 2.5 M14 X 2 10, 20, 30, 40, 50 75, 100, 125, 150 175, 200, 250, 300 M22 X 2.5 M14 X 2

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Smooth Cylinder Series CQSY

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

Turntable Cylinder Series MGT

XL XB XAH7 a b c d e XAH7 XC XL (mm) X X0.02 a b c d e Bore size (mm) XX section detail drawing 63 80 100 11 17.8 10 7 18.5 13.3 20.3 12 8 22.5 2-R3 15.3 23.3 13.5 10 30 8 6+0.05 0 6 WB Z WA XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA

3 Position Cylinder Series RZQ

W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 14 32 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18

AC Servo Motor Driver (CC-Link Type)

CN1 CN1 24VDC Emergency stop (Note 6) EMG DOCOM (Note 4) Servo-on SON DICOM (Note 4) ALM Trouble RA DOCOM -12- 3.2 I/O signal connection 3.2.1 Connection example (Sink I/O interfaces) An example of a connection for the I/O signal connection is shown below. Connect wires as necessary.

AP64

Check Valve Series AP64 Simple design with free of springs and poppets Reseals with minimal back pressure Low cracking pressure How to Order (Inlet) (Outlet) AP64 MV4 MV4 S Material Seat material Body material 316L SS secondary remelt Code Code Material FKM (Standard) CR S No code NP Surface finish Connections (Inlet, Outlet) Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25

AP10PA

S SHP SH 316L SS secondary remelt 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy Seat material Ni-Cr-Mo alloy H Material PCTFE (Standard) Polyimide 3) PTFE 4) 5) Code No code VS TF Gauge port (Inlete, Outletr) Pressure gauge 1) psig/bar unit MPa unit Surface finish Code Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) 3) Not available

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Blanking To lock in set position (Flow path: P RA): Turn the manual override clockwise by 180 to mark A press down. Valve is now locked in the set condition.(Flow path: P RA) To reset (Flow path: P RB): Turn manual override counterclockwise to mark B and press down. Valve will then be in the reset condition. (Flow path: PRB).