3

500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

HRX-OM-O021

:2009 EMC Directive 2004/108/EC EN61000-6-2:2005 EN55011:2009+A1:2010 Name and address of the person authorised to compile the technical file: Mr.

HRX-OM-R005

:2009 EMC Directive 2004/108/EC EN61000-6-2:2005 EN55011:2009+A1:2010 Name and address of the person authorised to compile the technical file: Mr.

CG1

Up to 600 Up to 750 Up to 750 With rod boot ZZ Bore (mm) Applicable pin part no.

OMR0032

B1 A1 Item Part No.

Possible to transfer a workpiece at low-speed.

Refer to page 328 for combination available between -XC and -XC. 318 Simple Specials CRQ2X Series Symbol Shaft Pattern Sequencing I -XA1 to XA8 CRB2 Symbol: A1 Symbol: A2 Additional Reminders CRB1 Machine female threads into the long shaft.

MXW

) A1: Moment center position distance compensation amount B1: Moment center position distance compensation amount (mm) C1: Moment center position distance compensation amount L3 C1 MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 (mm) (mm) MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 L1 A1 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 Mr My Mp W L2 B2 W W C2: Moment center position distance compensation

Table of Contents

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 Symbol 01 02 03 04 Symbol 50 60 65 80 85 15-2-87 16 16 Series KKH Dimensions: Socket (S) Male thread type (mm) A1 A2 When connected T Connection port size D H Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Weight g A2 Model A1 T KKH3S-01MS R 1/8 33.5 20.4 20.4 6.0 36.0 14 40.0 37.5 D -02MS 19.6 R 1/4 1/8 31.5 19.5

NCA1

Nuts (X130US) .. 25-31 Rod Boot . 32 Oversized Rod / Non-Rotating (XB5 / X119US) 33-36 Adjustable Stroke Extended (XC8) .. 37 Adjustable Stroke Return (XC9) . 38 Dual Operation Double Rod (XC10) . 39 Dual Operation Single Rod (XC11) .. 40 Special Rod End Modifications . 41 Accessories . 42 Auto Switch Options . 43 Precautions . 51 4 Medium Duty Air Cylinder Series NCA1 How To Order NC D A1

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

A2 A1 D1 L5 D1 AS-D A2 AS-T T ASP T ASN AQ Metric Size ASV L4 (1) L5 (1) A1 (2) A2 (2) M1 Weight (g) Max.

CHKD/CHKG

A32 A33 A34 Note 1) Dimensions indicated with an asterisk () in the patterns A1, A2, A18, A20, A22, A31, A32, A33, and A34 are provided in the table below.

Multi-Axis Step Motor Controller

LE CP 1 B A1 1 2 5 6 (17.7) (10.2) (14) (18) A6 B1 B3 A1 A3 B6 (13.5) 1 2 Cable length (L) [m] 15 16 Connector B Connector D (14.7) (30.7) L (11) 1 1.5 3 3 5 5 8 8*1 (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (5.5) (6.3) (5.7) (14.2) Connector C A 10*1 Actuator side (Terminal no.)

Dual Speed Controller with One-touch Fitting Series ASD 1

A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

A2 A1 D1 L5 D1 A2 T T Inch Size L4 L5 A1 A2 M1 Max.

ASD

L5 L5 A1 A2 D1 D1 A2 T T Inch L4 L5 A1 A2 M MAX.

AS-FG/ASD-FG

A2 A1 D1 L5 D1 A2 T T Inch size L4 L5 A1 A2 M1 Max.

Booster Regulator/Air Tank

VBA2A: Qb = 600 [L/min (ANR)] VBA4A: Qb = 1050 [L/min (ANR)] Refer to Flow Rate Characteristics on pages 1012 and 1013. Avoid pulsation. (Max. 0.05 MPa) NO: Need no tank The VBA4A can supply necessary pressure. NO Judgement of flow rate YES YES The VBA2A cannot obtain necessary pressure. Select the tank from table below.

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Symbol Indication symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 4, 6 6, 8 6 8, 10 6 8 10, 12 10 12 Metric size 1/8" 5/32" 3/16" 1/4" 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size 350 500 600 700 1200 1300 295 75 175 Flow rate (L/min (ANR)) Controlled flow Free flow

ZSE30A(F)/ISE30A

30 42.5 Bracket A (Option unit part no.: ZS-38-A1) 25 20 20 45 30 2 30 34.6 19 5.2 14.7 9.6 5.2 Bracket configuration allows mounting in four orientations.