This is a legacy product, and replaced byC96NDB80-200C, 80MM ACNL OTHERS (COMBO), ACTUATOR, ACNL TIE-ROD CYLINDER, RC, 80MM ACNL OTHERS (COMBO), 10.80265 lb

This is a legacy product, and replaced byC96SDB50-200C, CYL, TIE ROD, ISO, AUTO-SW, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 5.24210 lb

This is a legacy product, and replaced byC96SDB50-200C, CYL, TIE ROD, ISO, AUTO-S *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 6.13619 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)C95ISO cylinderC95SDouble acting, Single rod--666

This is a legacy product, and replaced byC96SDB40-200C, CYL, TIE ROD, ISO, AUTO-SW, ACTUATOR, C95/C96 TIE-ROD CYLINDER, ME, 40MM C95/CP95 DBL-ACT AUTO-SW, 3.44472 lb

This is a legacy product, and replaced byCP96SDB32-200C

This is a legacy product, and replaced byCD75EB32-200C-B

High Vacuum Angle Valve, XL Series

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

This is a legacy product, and replaced byCP96SDB50-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 6.06961 lb

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Escapements Finger options Tapped on upper and lower faces Tapped on all faces Attachment mounting thread 8-FD through Attachment mounting thread 4-FD through RE A B REC CX CY FF FE FF FE FC MQQ M Attachment mounting thread 2-FD thread depth FG RHC FC FF FE MK(2) FB FA FB RS Q G FA RS H A Stroke adjuster Scraper RZQ MI W S CEP1 (JA) SA CE1 CE2 ML2B Hexagon width across flats RB SB SC 2-RA

2–4

Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA

CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 12 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Escapements Series MIW/MIS

(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Additionally, do not mount the foot bracket with the pressure applied to the port. y 0 A port B port a 1 w y y a e k w of y e e k g n of ra n e io at g ot R n R +4 0 ra ot n io 0 at at ot 8 R io 1 R +4 0 n y ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e of k 189

2-Color Display Digital Flow Switch Series PFM

Ra is used to compensate the gas and/or ambient temperature. (a) The gas is static. Ra Ru Rh Rd Flow (b) The gas flows from the left side. 931 Series PFM7/PFM5 Component Parts Straight piping No.

Compact Cylinder

(RB) M L B + Stroke E A + Stroke 25 Width across flats K M: Rod end male thread D H Hexagon width across flats B1 Rod end nut H1 C X L1 Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L1 X 13 13 5 5 14 14 10 12 M8 x 1.25 M8 x 1.25 8 10 22 22 16 16 20 25 Basic Style (mm) Bore size (mm) A B C D E F H I K L M N OA OB Q RA RB T 43 45 37 39 10 10 10 12 36 40 5.5 5.5 M6 x 1.0 M6 x 1.0 43

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

Escapements Series MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Flow Sensor Series PFMV

Ra is used to compensate the gas and/or ambient temperature. (a) The gas is static.

Smooth Cylinder/Low Speed Cylinder

Basic style (Through-hole/Both ends tapped common): CQSXB/CDQSXB 12 Auto switch Minimum lead wire bending radius 10 16 H thread effective depth C 2 x M5 x 0.8 2 x 4 x OB counterbore depth RB 2 x 4 x OA effective depth RA Note 1) 4 x N through Flat washer 4 pcs.