Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

S = 5.0 600 500 400 300 200 100 VDW304 S = 8.0 900 800 700 600 500 400 300 200 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 300l/min (ANR) for orifice 2.3 (VDW20) is P1 approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

VDW Series

S = 5.0 600 500 400 300 200 100 VDW304 S = 8.0 900 800 700 600 500 400 300 200 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 300l/min (ANR) for orifice 2.3 (VDW20) is P1 approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

MY2C16 MY2HT16 Horizontal impact: P = 0.5 MPa Horizontal impact: P = 0.5 MPa 1500 2000 2000 1500 H unit Impact speed mm/s Impact speed mm/s 1000 1000 L unit 500 400 300 400 500 L unit 300 Air cushion Air cushion 200 200 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.

Thermo-chiller/Rack Mount Type

400 32C 25C 25C 300 300 200 200 5C 5C 100 100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

valve Max. operating frequency (Hz) 5 Symbol 3 position 3 Non-locking push type Manual override Series 10-SV1000/2000/3000/4000 Push-turn locking slotted type Internal pilot Main/Pilot valve common exhaust Pilot exhaust method 2 position single External pilot Pilot valve individual exhaust (A)4 2(B) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2

ML2B

Fix the adjusting bolt to around 0.5 mm projection from the shock absorber as shown below. m: Weight of impact object (kg) g : Gravitational acceleration (9.8 m/s2) RHC 2000 1500 Stroke adjusting unit MK(2) Note) The speed of the impact object is measured at the time of impact with the shock absorber.

ML2B

CX 100 10 20 30 4050 100 200 300 Thrust energy E2 400 500 Fs Fs + mgs Fsmgs CY W2 max W1 max W3 max Absorbed energy E E1 + E2 MQQ M Caution Allowable load (N) Symbol : Speed of impact object (m/s) F : Cylinder thrust (N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

SMC Pneumatic Clean Series

Do not drop, bump, or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 5. Do not allow short circuiting of loads.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

300 500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution

OMR0032

80 mm/s2 Target position 2: Travel distance 5 mm, Travel speed 20 mm/s, Acceleration 80 mm/s2, Deceleration 80 mm/s2 ii.Calculation example Travel distance [Number of pulses (pulse)] = Travel distance (mm) Encoder resolution (m/pulse) Travel speed [Pulse frequency (pulse/s)] = Travel speed (mm/s) Encoder resolution (m/pulse) Acceleration and Deceleration time [s] =Travel speed (mm/s) /

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

SMC Pneumatic Clean Series

Do not drop, bump, or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 5. Do not allow short circuiting of loads.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Pilot exhaust method 2 position single, double 3 position 5 3 5 3 Non-locking push type, Push-turn locking slotted type, Push-turn locking lever type Internal pilot External pilot Pilot valve individual exhaust Main/Pilot valve common exhaust Lubrication Not required Unrestricted 150/30 Dust proof ( DIN terminal and M8 connector: IP65) Mounting orientation Impact/Vibration resistance (m/s2

Heavy Duty Stopper Cylinder

(Example) Mass of transferred object: 300 kg, Transfer speed: 20 m/min Friction coefficient: = 0.1 Mass of transferred object m [kg] Friction coefficient RS2H50-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.1 = 0.2 500 500 Mass of transferred object m [kg] Mass of transferred object m [kg] 50 Operating range Upper limit 400 400 Upper limit 50 Operating range

ITV

P4 is selected by the ON/OFF combination of S1 and S2.

V

Ambient & Fluid Temperature -10 ~ 50C A Clean Room version is available to specified Lubrication Not Required order Manual Override Non-Locking Push Type Shock Resistance/Vibration Resistance 150 / 30m/s2 Mounting Orientation Free The VQD1000 is used either on a Single SubEnclosure Dust Proof base or Manifold Mounted.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/