Oscillation Angle A: 360°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 1.2, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type

Oscillation Angle A: 360°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 1.2, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type

Oscillation Angle A: 360°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 1.2, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type

Oscillation Angle A: 360°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 1.2, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type

Oscillation Angle A: 360°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 1.2, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type

Protocol: 9 (EtherNet/IP™), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 30, Max Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 1 (Continuous Rotation: 360°)

Protocol: 9 (EtherNet/IP™), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 30, Max Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 1 (Continuous Rotation: 360°)

Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 1 (Continuous Rotation: 360°)

Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 1 (Continuous Rotation: 360°)

Table Accuracy: Basic Type, Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.32; LER30: 1.2; LER50: 10), Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m), Controller Type - JXC: CP1 (JXCP1, PROFINET), Controller Mounting: 8 (DIN Rail Mounting)

VQ4000

(A) 4 (B) 2 (A) 4 (B) 2 VQZ 3 1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Upstream pressure MPa 41 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Table of Contents

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(B) 2 (B) 2 (A) 4 (A) 4 Number of solenoids Plug Plug Single Double Locked position 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) LOCK PUSH (B) 2 (A) 4 (A) 4 (B) 2 Plug Plug 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) (JIS Symbols above: Series 10-SYJ5000) Caution When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.

VQ5000

) 200 VAC Inrush 2.6 VA (11.7 mA), Holding 2.6 VA (11.7 mA) 220 VAC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Note 1) Use dry air to prevent condensation when operating at low temperatures.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 4 (B) 2 Rated coil voltage Side-ported 1/2 FHG 3 4 24 VDC Side-ported 3/4 12 VDC 1 (P) 5 (R1) 3 (R2) Side-ported 1 Voltage other than above (50 VDC or less) 9 (A) 4 (B) 2 Bottom-ported 1/4 Bottom-ported 3/8 FJG Bottom-ported 1/2 1 (P) 5 (R1) 3 (R2) Option Bottom-ported 3/4 Nil Z (A) 4 (B) 2 None Light/Surge voltage suppressor FIG Sealing type 5 (R1) 1 (P) 3 (R2) Nil R Metal seal (B)