Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 300mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m)

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 150mm, Motor Option: None, Rod End Thread: M (Male), Mounting: L (Foot), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m)

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: W (with Lock/Motor Cover), Rod End Thread: Female, Mounting: G (Head Flange), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m)

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 30mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m)

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m)

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 150mm, Motor Option: None, Rod End Thread: Male, Mounting: Foot, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: with Lock/Motor Cover, Rod End Thread: Female, Mounting: Head Flange, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 30mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 300mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Table of Contents

) kit (Terminal block) 2-4-1 2 Valve Specifications Sonic conductance: Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] M plug connector Push type, Tool required L plug connector Locking type (Manual) Single Locking type Closed center Double Exhaust center Pressure center Grommet Plug-in 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1

ARM10/11

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

ARM10/11

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

XM, XY

registered trademark of Nippon Valqua Industries, Ltd. 481 b XMA, XYA Series Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature (C) 5 to 60 (High temperature type: 5 to 150

A

NAR1000 NAW1000 K10 1/8NPT 0 ~ 160PSI NAR2000 2500 NAW2000 3000 K12 1/4NPT 0 ~ 160PSI NAR4000 NAW4000 K13 1/4NPT 0 ~ 30PSI NAR4000 NAW4000 K20 1/8NPT 0 ~ 30PSI NAR2000 2500 NAW2000 3000 G27-10-R1 116 Connection D I M E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1

180

Calculate the moment of inertia of attachment. z r1 Material of attachment: Aluminum alloy (Specific gravity = 2.7) A part z1 r1 = 37 (mm) Calculation of weight m1 = a x b x c x Specific gravity m1 = 40 x 7 x 8 x 2.7 x 10-6 = 0.006 (kg) Moment of inertia around Z1 axis IZ1 = {m1(a2 + b2)/12} x 10-6 Iz1 = {0.006 x (402 + 72)/12} x 10-6 = 0.8 x 10-6 (kgm2) IA = 0.8 x 10-6 + 0.006 x 372 x 10

MHY2/MHW2

Operating model: MHY2-16D Opening time: 0.15s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d Material of attachment: Aluminum alloy (Specific gravity = 2.7) r1 = 37 (mm) z r1 Calculate the moment of inertia of attachment.

CNG

NDH10 MM MM MM NDH10 MM L L R1 R1 R1 R R R1 R R E1 E1 E1 E1 U1 NX NX A1 U1 A1 L1 U1 A1 NX U1 A1 L1 NX L1 NZ A L1 A NZ A A ND Part no. Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable A Applicable bore size (mm) MM R1 U1 NDH10 NX R1 R Part no. R pin part no.