High Vacuum Angle Valve, XL Series

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

Speed Controller with One-touch Fitting

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

VQZ 1 (P) 5 (R1) 3 (R2) Port plug mounting port VQD 3 position exhaust center (A) 4 (B) 2 Nil A B 4 None Port 4(A) 1 (P) 5 (R1) 3 (R2) Port 2(B) 3 position pressure center (A) 4 (B) 2 5 Cylinder port 1 (P) 5 (R1) 3 (R2) C3 C4 C6 M5 L3 L4 L6 L5 One-touch fitting for 3.2 4 position dual 3 port valve One-touch fitting for 4 (2) (A) 4 (B) 2 Side ported A One-touch fitting for 6 5 (R1) 3 (R2)

Table of Contents

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

Air Cylinder

Applicable bore size (mm) A A1 E1 L1 MM R1 U1 NDH10 NX CM2 U1 L1 A A1 I-G02 20 34 8.5 16 25 M8 x 1.25 10.3 11.5 8 +0.058 0 8 0.2 0.4 I-G03 25, 32 41 10.5 20 30 M10 x 1.25 12.8 14 10 +0.058 0 10 0.2 0.4 I-G04 40 42 14 22 30 M14 x 1.5 12 14 10 +0.058 0 18 0.3 0.5 I-G05 50, 63 56 18 28 40 M18 x 1.5 16 20 14 +0.070 0 22 0.3 0.5 I-G08 80 71 21 38 50 M22 x 1.5 21 27 18 +0.070 0 28 0.3 0.5 I-G10

For post-stoppage positioning and locking

Pallet Lock Cylinder W-R1/W-R3 Series How to Order W R1 S2 Type 1 B W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

How to Order Connector Assembly 30 4A SY100 For DC: 30 1A SY100 For 100 VAC: 30 2A SY100 For 200 VAC: 30 3A SY100 For other voltages of AC: Caution When making connections, please note that using other than the specified size (3.5 to 7) cabtire cable will not satisfy IP65 (enclosure) standards.

XM, XY

temperature XLA16A-30-1H XLA25A-30-1H XLA40A-30-1H XLA50A-30-1H XLA63A-30-1H XLA80A-30-1H XMC XYC General use XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1 XLC63-30-1 XLC80-30-1 High temperature XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H XLC63-30-1H XLC80-30-1H XMD XYD XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD63-30-1 XLD80-30-1 General use : Standard High temperature XLD25-30-1H XLD40-30-1H

IDX-OM-W093

ADH-E400 1.6MPa 0.051.6MPa 3/h 0.024m 0.7MPa IDF60/70/80/90 Series 10-1 IDX-OM-W093 L 10.3 Rc1/225 30 5 IDF60 2722IDF70IDF80IDF90 22 IDF60 (IDF70/80/90) 1) 2830Nm 2) 10.4 1 1 IDF60/70/80/90 Series 10-2 IDX-OM-W093 R 11 R R (GFCI) 11.1 11.2 IDF60-20-R IDF70-20-R IDF80-20-R IDF90-20-R (A) 10 15 20 30 (mA) 30 IDF60-30-R IDF70-30-R IDF80-30 IDF90-30 (A) 10 15 20 (mA) 30

CG5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 20 20 I-G02SUS Y-G02SUS 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

Thermo-chiller

Note q Nipple Stainless steel HRLE090 R1 2 For CH1 HRLE050 R1/2 [CH2 side] w Ball valve Stainless steel HRLE090 Rc1 1 For CH1 HRLE050 Rc1/2 t w e Different diameter tee Stainless steel HRLE090 Rc1 x Rc3/8 1 For CH1 HRLE050 Rc1/2 x Rc3/8 r Hexagon bushing Stainless steel HRLE090/050 Rc3/8 x Rc1/4 2 For CH1/CH2 t Pressure gauge HRLE090/050 R1/4 2 For CH1/CH2 y Nipple Stainless steel HRLE090

51

A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle

76

Air dryer model IDF100FS-30-R IDF125FS-30-R IDF150FS-30-R Breaker capacity 20 A 30 A Sensitivity current: 30 mA Corrosion is not covered under warranty. Option symbol V With a timer controlled solenoid valve type auto drain Option symbol Float type heavy duty auto drain is changed to the solenoid valve type auto drain.

SX

R1 OMRON Corp.: CompoBus/S System (16 output points) SS5X3-45SA-05U-C61 set (45S with serial 5-station manifold base no.) SX3140-5LOZ2 sets (Single solenoid part no.) SX3240-5LOZ3 sets (Double solenoid part no.)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No

VCC

VCC13-00 45.90.1 38.40.1 230.1 1.2 to 2 hole 16.50.1 4 hole 4 hole Leakage detection port RETURN port 1.2 hole VNA Pilot port IN port VNB OUT port 30 R0.2 SGC 230.05 22.50.05 M26 x 1.5 3.8 hole SGH 240.05 220.05 VNC C1 VNH 30 30 30 VND 2.5 8.5 32.70.05 VCC VCC 40.50.1 TQ 480.1 550.05 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3. 649 VCC Series Dimensions

PSxx-OMM0006CN

) ON OFF Hysteresis ON-OFF /, () () 25[]ON-OFF (copy function) () -13No.PS-OMM0006CN-E NPN () () ()()( ) () ON ON 0 (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005 V ) 30 ON-OFF ON () (P1LP1H P2LP2H)ON (30 ) () "digit" () 0 () SI ONOFF -14No.PS-OMM0006CN-E () () () () ON ON () (n1Ln1H n2Ln2H)ON (30 ) 30 (0FF)(ON)(OFF) (ON) () 5R.D.(5) (01 MPa 0.001 MPa 1/1000)

4/5 Port Air Operated Valve SYJA3000 Series

)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position exhaust center 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) How to Order Manifold Base 3 position pressure center 2(B) (A)4 Same manifolds as SYJ5000 series are prepared.

PSxx-OMU0002CN

/8 NPT1/8 4 mm 6 mm 1/4 inch 5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g +39 g 0.15mm 2(AWG26) 1.0 mm (5 ) 3.5 -77No.PS-OMU0002CN-D M5 42.6 7 M50.8 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5