Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: w/o Cable, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 25, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 350mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 3m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 25, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 350mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LEY, Type: Rod Type, Body Size: 25, Bearing Type: None, Motor Mounting: Top Mounting Type, Lead: B (16: 5mm; 25: 6mm; 32, 40: 8mm), Stroke: 350mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Actuator Series: LEY (Rod Type), Size: 25, Motor Mounting Position: Top Mounting Type, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm), Stroke: 350mm

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

CRB2/CRBU2/CRB1

CRBU2W-SE Free-Mounting Type CRBU2 CRB2 CRBU2W10-SE CRBU2W10-S CRB1 (mm) (depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) 10.5 10.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 0.004 0.012

Table of Contents

A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5

ITV

P4 is selected by the ON/OFF combination of S1 and S2.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Air-hydro Unit

W QL S QB NL P 50 100 200 300 400 600 700 800 500 CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 11 9.5 30 0 3 86 62.5 28 228.5 278.5 378.5 503.5 603.5 728.5 13 7 2 5 120 32 82.5 33 286 386 511 611 736 836 7 2 13 120 32 33 5 92 399 524 624 1049 949 749 849 Hexagon socket head cap screw is used for mounting hole. 7 0 185 46 2.5 20 120 29 D-X Technical Data

CC

stroke W S QL QB P NL 800 700 600 500 400 300 200 100 50 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 728.5 603.5 503.5 378.5 278.5 228.5 7 13 2 32 120 5 33 82.5 611 511 386 286 836 736 207 13 2 32 120 5 33 92 624 524 399 949 849 749 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46 185 0 29 120 Data 10-17

CEx-OMQ0013

P16 s1 s1 s1 s1 s2 s2 s2 s2 ... ... ... ... s32 s32 s32 s32 0.5mm) 1 2 , 2. 30mm 30mm 3.

CEx-OMG0106

Program P1 P2 P3 P16 S1 S1 S1 S1 S2 S2 S2 S2 Step S32 S32 S32 S32 Following are CEU2s special feature: 1. Predictive Control & Learning Function (Allow High Repeatability and Precision. 0.5mm) With learning function, after every execution, brake point will be amended, according to the deviation of stopping position from setting position.

CEx-OMQ0011

P16 S1 S1 S1 S1 S2 S2 S2 S2 ... ... ... ... S32 S32 S32 S32 0.5mm) 1 2 2. 3.

AC Servo Motor Driver (MECHATROLINK-III type)

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2.

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1