Table of Contents

2 u t o !3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

SX

T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Thermo-chiller

Note q Nipple Stainless steel HRLE090 R1 2 For CH1 HRLE050 R1/2 [CH2 side] w Ball valve Stainless steel HRLE090 Rc1 1 For CH1 HRLE050 Rc1/2 t w e Different diameter tee Stainless steel HRLE090 Rc1 x Rc3/8 1 For CH1 HRLE050 Rc1/2 x Rc3/8 r Hexagon bushing Stainless steel HRLE090/050 Rc3/8 x Rc1/4 2 For CH1/CH2 t Pressure gauge HRLE090/050 R1/4 2 For CH1/CH2 y Nipple Stainless steel HRLE090

IDX-OM-W093

IDX-OM-W093-B / Series IDF60-20-A,C,L,R,T,V IDF60-30-A,C,L,R,T,V IDF70-20-A,C,L,R,T,V IDF70-30-A,C,L,R,T,V IDF80-20-A,C,L,R,T,V IDF80-30-A,C,L,R,T,V IDF90-20-A,C,L,R,T,V IDF90-30-A,C,L,R,T,V URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ SMC *1) JIS B8370 *2) ISO4414 *1) ISO4414Pneumatic fluid power Recommendations for the application

Air Cylinder

3 t CJ1 CJP CJ2 JCM y t CM2 CM3 CG1 CG1 20 to 32 CG3 Component Parts JMB No.

IDX-OM-M051

/2 R1/2 36 129 20 7122 350 700 752 1.3 Name and function of parts Facility water outlet Terminal block for signal Facility water inlet (Symbol: W5) (Symbol: W5) R1/2 R1/2 Refer to 6.3 Outer dimensions 6 4 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

VF1000-OMP0001

DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1

Table of Contents

VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

CG5-S

q o i r y t !

Vacuum System Peripherals:

Standard, Internal pilot specifications External pilot specifications Nil R Internal pilot, Built-in silencer S External pilot, Built-in silencer RS 08 SUNX Corp.: S-LINK system (16 points output) J1 SUNX Corp.: S-LINK system (16 points output) J2 Fuji Electric Co., Ltd.: T Link Mini System K DeviceNet, OMRON Corp.: CompoBus/D Q OMRON Corp.: CompoBus/S (16 points output) R1 OMRON Corp.: CompoBus

VCC

r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

IDX-OM-W094

12 T T 12.1 12.2 z z AC240V / DC24V 5A() / 2A() DC20V 3mA IDFA60/70/80/90 Series 12-1 IDX-OM-W094 T 12.3 AC230V z ON z A(4-5) B6-7 z A4-5A B6-7B z 3 5 /() z OFF 3 z OFF 6.2 IDFA60/70/80/90 Series 12-2 IDX-OM-W094 T 12.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFA60-23-T IDFA70-23-T IDFA80-23-T IDFA90-23-T M3.5 8.5mm M4.0 9.5Mm [3.2.5 ] IDFA60

IDX-OM-U010

IDX-OM-U010-H PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFC60-23-C,L,R,T,V IDFC70-23-C,L,R,T,V IDFC80-23-C,L,R,T,V IDFC90-23-C,L,R,T,V This manual is intended to explain the installation and operation of the product.

IDX-OM-V020

IDX-OM-V020 Original Instructions PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFA60-23-A,C,L,R,T,V IDFA70-23-A,C,L,R,T,V IDFA80-23-A,C,L,R,T,V IDFA90-23-A,C,L,R,T,V This manual is intended to explain the installation and operation of the product.

XM, XY

Part numbers indicating changed seal material and leakage Changed part Note 2) Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Symbol 1349-80 2101-80 Internal External FKM EPDM Barrel Perfluoro w, e, r, t w, r, t e 1.3 x 10-10 (FKM) 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310

IDX-OM-W095

11 T T 11.1 11.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDFC60/70/80/90 Series 11-1 IDX-OM-W095 T 11.3 AC230V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDFC60/70/80/90 Series 11-2 IDX-OM-W095 T 11.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series

IDX-OM-W032

IDX-OM-W032-D / Series IDFA22E-23C,K,L,R,T,V IDFA37E-23C,K,L,R,T,V IDFA55E-23C,L,R,T,V IDFA75E-23C,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General rules and safety requirements for systems and their components *2) JIS B8370 URLhttps:/

S Couplers Series KKH

Dimensions/Socket (S) Male thread type A2 A1 T D H L1 L2 (mm) A1 A2 Effective area mm L2 Body size H Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.