SMC Corporation of America
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L I mberinq syslemr I I Body size a E r\4tG_l E ita.1t4 | E 3ta E : : ; l I (New n (old nu USA USA Euro "oO, .,."

(PNP) /5V.12\ I Iy " (NP;;:'OO'I 5V A96 I e , '.. ,. 2-w". ~ ~ ~ Grommet ~ 1""' 100V ; Ott,",' ',Co 1'00" ',$ e 1~ ~2tJ1)' A54 iPle It.k 2-.,.,ire 24 V A64 e 1 =:, :' 12 V A33 .1 :, A34 1D'N te,,,na' A44 -1 , ,I G'omme, A59W e e lSm .

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

(b) 1) Vb[V] 2) (Ib) Ib = Vb R [A] 3) (E) L lb2 E = 2 [J] 4) (Vi) (Ib)(Vi)(E) (Vi)[V](Vs)[V]Vi ViVs 5) () () = E Vi lb [S] 6) ()N (Ip) (Ip)(Ib) Ip/IbN[] (4) 13 3 13. 13.1.2 ( ) () LE--B S5 S6 S7 S8 50W 100W 200W 400W (1) () (4) DC 24 V 0 -10% [W] at 20 6.3 7.9 (6) [] 91.0 73.0 (6) [H] 0.15 0.18 [N m] 0.32 1.3 (2) [s] 0.03 0.03 (2) [s] 0.01 0.02 1 [J] 5.6 22 [J] 56 220 (5

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

LED I/O 7 LED 12.2 (P.66 g I/O RESET C24V 12.1 LED I/O LED LED b 7 LED I/O ALARM OUT03 7 LED A B C D E 7 ALARM *12 OUT0 OUT1 OUT2 OUT3 LED A A OFF ON OFF OFF OFF RESET g B b OFF OFF ON OFF OFF C c OFF OFF OFF ON OFF D d OFF OFF OFF OFF ON E E OFF OFF OFF OFF OFF AD OUT03 ON E OUT03 OFF *1 ALARM b OFF *2 OFF ALARM OFFALARM *3 ON f b g 65 No.JXC-OMU0004-A 12.2 A OFF RESET

~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In . L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIO

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY on ti rp so on ad a ZQ sl or an l f ea te d ZF id wo pe rk ZP ty su nt ZCU oi rf ac l j AMJ al e s B Misc.

Spring Return/Double ClevisType (D) r.rclzol e*" "iaF] srotd s Clevis pin included 2A I @sil/tr SERIES NCJ2 Standard Type: Single Acting/ Spring Extend Spring Extend/Basic TYPe (B) r.rcrze [E-" "izel-lst t"l r NCJ2B10, 16 '06 (1i4') e 16 (Y8") Spring Extend/Foot TyPe (L) nc.

Spring Return/Double ClevisType (D) r.rclzol e*" "iaF] srotd s Clevis pin included 2A @sil/tr I SERIES NCJ2 Standard Type: Single Acting/ Spring Extend Spring Extend/Basic TYPe (B) r.rcrze [E-" "izel-lst t"l r NCJ2B10, 16 '06 (1i4') e 16 (Y8") Spring Extend/Foot TyPe (L) nc.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad diameters: 10, 13, 16, 20 25, 32, 40, 50 rp ti on so ad on r sl fo a nt al e e d id w e or p ty k t s in u rf o j a ll c a e B s Series ZPT: Vertical vacuum entry type Series ZPR: Lateral vacuum entry type One-Touch fitting Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad diameters: 10, 13, 16, 20, 25, 32, 40, 50 Pad materials: NBR, Silicon rubber

9h, 8-0 counter bore deplh 7 Bore size 040, 5O/RSI Ora#-Lll D Widlh across tlats: K With locking mechanism r cancel cap/Rs ':O: tr-t ll lE ' Dimensions of lhe model with a cancel cap are the same as lhose shown in the above drawings. > t l U 9 I , o E l l 'Dimensions for the maximum snoqy aDsofpron LNore 4lThe rou shoG an e\tended rr ston tod (Nore 5r'or \tq acrrno, on" oLLl a rrgsd?

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5