Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

VDW

3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY 3 000 6A C4 Series Thread type SY3000 SY5000 SY7000 3 5 7 Rc Nil F G N NPT NPTF T A, B port size Thread piping One-touch fitting (Metric size) Except for M5 Fitting assembly part no.

Table of Contents

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

VDW Series

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

42

3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4300 VQ4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4400 VQ4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4500 VQ4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts Number Description Material Note 1 Body Aluminum die-casted 2 Spool/Sleeve Stainless steel 3 Piston

SQ1000/2000

A Black 8A 6B Station 4 Black 6A Station 3 SOL. B White 7A 7B Station 3 White 7A SOL. A Black 6A 8B Station 3 Black Station 4 8A SOL. B White 5A 9B Station 2 Black 9A SOL. A Black 4A 10B Station 6 Black Station 1 Black 10A Station 5 SOL. B White 3A SOL.

Vacuum System Peripherals:

17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve Series VT VT325/307/317 to 1 8 3 8 Vol. 4 0.63 to 5.5 3 port solenoid valve Series VP VP300/500/700 to Vol. 4 1 8 1 2 2.9 to 15 3 port solenoid valve Series VS to Vol. 4 1 8 3 4 3.8 to 20 3 position valve Series

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2 2 3 4.5 2 1 8 (6A) 1 8 (6A) 320 4.5 2 300 3 3 1.0 7.9 0.33 500 320 500 660 500 660 1 4 (8A) 4.5 15 0.61 470 620 470 620 560 700 560 700 470 470 620 470 620 560 700 560 700 560 700 4.5 0.61 15 1 4 (8A) 1.0 6 1.1 26 6 1.1 26 8 1.6 38 3 0.33 7.9 0.5 500 10 4.5 0.61 15 1.9 46 3 8 (10) 660 500 660 3 7.9 0.33 6 1.1 26 4.5 0.61 15 1.0 Note) Weight of grommet type.

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.