Made to Order

5 6 6 6 6 6 9 18 17 22 22 26 26 34 41 6 7 9 8.5 11 11 14 16 5 6 6 6 6 6 8 9 5 5 5 5 5 5 6 6 20 25 32 40 50 63 80 100 120 119.5 139.5 139.5 160.5 160.5 190.5 200.5 0 0 15.5 9 16.5 11.5 8 10.5 24.5 24 34 27.5 37.5 32.5 35 35.5 57 56 70 63.5 78.5 73.5 84 74.5 80 93 110 118 146 160 199 236 87.5 87.5 103.5 103.5 119.5 119.5 141.5 161.5 MGPL, MGPA (Ball bushing bearing) A, E, HT Dimensions (mm)

Smooth Cylinder/Low Speed Cylinder

stroke (mm) Without auto switch With auto switch Bore size (mm) C D E F OA OB Q RA RB T H I K L M N A B A B 12 16 20 25 22 22 29.5 32.5 25.5 25.5 34 37.5 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 17 17 19.5 22.5 20.5 20.5 24 27.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0

Table of Contents

Y A J K B Y C D Misc.

Aluminum High Vacuum Angle Valve

D16 X65 XLA XSA Pilot port direction Seal material changed part Bonnet assembly XVD Symbol Nil Rear (as seen from body connection point) Left (as seen from body connection point) Right (as seen from body connection point) K M Pilot port direction Temperature 5 to 60C 5 to 150C XLG100-30-1-1 XLG100-30-1H-1 Part no.

Air Cylinder

B2 P G Width across flats B1 H1 Plug with fixed orifice NN Width across flats KA TY TD D E I MM F AL A K H + Stroke Width across flats NA TT S + Stroke TX TZ ZZ + 2 x Stroke Z + 2 x Stroke (mm) Bore size A AL B1 B2 D E F FL G H H1 I K KA MM NA NN P TD TT TX TY TZ 20 18 15.5 13 26 8 20 0 0.033 13 10.5 8 41 5 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 8 10 32 32 52 25 22 19.5 17 32 10 26 0 0.033 13

Table of Contents

5.

CA2

5 !6 !7 !8 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

round shaft CRJ XA40 Shaft through hole XA41 Shaft through hole CRA1 XA43 Shaft through-hole + Double shaft-end-female threads XA44 Shaft through-hole + Double shaft-end-female threads CRQ2 T, J, K T, J, K XA45 XA45 Middle-cut chamfer K K XA46 Middle-cut chamfer MSQ MRQ Combination Chart of Made to Order DChart 5.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Middle-cut chamfer K K XA46 Middle-cut chamfer MSQ MRQ Combination Chart of Made to Order DChart 5.

ISO Cylinder

6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 16 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 Bottom side mounting: Cl85RAF/Y B 20/25 Stroke (XB) G1 (WH) Width across flats SW EE EE 2 x LD G2 KK ND h8 NA NA B LH Width across flats K C AM NA NA LX L N2 N1 H 3 ZZ + Stroke S + Stroke Head cover axial port

Vacuum Unit

V Output impedance: Approx. 1 k FUNC Blue DC() ue DC() Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less FUNC Blue DC() Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B

5

Bore size (mm) B1 C1 H1 L1 MM X 12 8 9 4 14 M5 x 0.8 10.5 16 10 10 5 15.5 M6 x 1.0 12 20 13 12 5 18.5 M8 x 1.25 14 25 17 15 6 22.5 M10 x 1.25 17.5 Standard Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T A B A B 12 5 to 30 25.5 22 30.5 27 6 6 25 5 M3 x 0.5 32 5 3.5 15.5 3.5 M4 x 0.7 6.5 7.5 7 4 0.5 16 5 to 30 25.5 22 30.5 27 8 8 29 5 M4 x 0.7 38 6 3.5 20 3.5 M4 x

V

B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

LJ1H

K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

modular-press-e

AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR40(K)-06 AR60(K) No.

Modular F.R.L. Pressure Control Equipment

AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR40(K)-06 AR60(K) No.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

of short shaft length Change of double shaft length Change of short shaft length Change of double shaft length XA45 CRA1 XA46 XA47 XA48 CRQ2 Y Y Y Y Y XA49 XA50 MSQ K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination

NCA1

J K R TF UF 1 1/2 2 3/8 3/8 5/16 2 1 1/4 1.43 2 3/4 3 3/8 2 2 1/2 3/8 3/8 3/8 2 1 5/16 1.84 3 3/8 4 1/8 2 1/2 3 3/8 3/8 3/8 2 1 1/8 5/16 2.19 3 7/8 4 5/8 3 1/4 3 3/4 1/2 5/8 7/16 2 1/4 1 1/4 3/8 2.76 4 11/16 5 1/2 4 4 1/2 1/2 5/8 7/16 2 1/4 1 1/4 3/8 3.32 5 7/16 6 1/4 5 5 1/2 1/2 5/8 9/16 2 1/4 1 1/2 7/16 4.10 6 5/8 7 5/8 6 6 1/2 3/4 3/4 9/16 2 3/4 1 5/8 7/16 4.88 7 5/8 8 5/8 5 Dimensional

Air Cylinder NCA1 Series

J K R TF UF 1 1/2 2 3/8 3/8 5/16 2 1 1/4 1.43 2 3/4 3 3/8 2 2 1/2 3/8 3/8 3/8 2 1 5/16 1.84 3 3/8 4 1/8 2 1/2 3 3/8 3/8 3/8 2 1 1/8 5/16 2.19 3 7/8 4 5/8 3 1/4 3 3/4 1/2 5/8 7/16 2 1/4 1 1/4 3/8 2.76 4 11/16 5 1/2 4 4 1/2 1/2 5/8 7/16 2 1/4 1 1/4 3/8 3.32 5 7/16 6 1/4 5 5 1/2 1/2 5/8 9/16 2 1/4 1 1/2 7/16 4.10 6 5/8 7 5/8 6 6 1/2 3/4 3/4 9/16 2 3/4 1 5/8 7/16 4.88 7 5/8 8 5/8 5 Dimensional