High Vacuum Angle Valve, XL Series

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.

XL

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.

High Vacuum Angle Valve

air (Bellows balance) 2 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW

MY2

resin NBR NBR NBR NBR NBR No. 14 15 22 50 51 52 53 54 Qty. 1 1 2 2 2 2 4 2 14 Series MY2C 16, 25, 40 MY2C G Bore size Stroke Q + Stroke PG (LL) L 4-MM, depth M 4-B depth of counter bore C LA Work piece mounting center line LD through hole PA Work piece mounting center line Cylinder mounting center line PB PC MW LC LE Cylinder mounting center line QW PF NX 4 x 2-square nut J PD LB NH NT NW

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

5 @2 %0 %1 %2 %3 %4 8-13-17 18 Series MY2 16, 25, 40 MY2C G Bore size Stroke Q + Stroke PG (LL) L 4-MM, depth M 4-B depth of counter bore C LA Workpiece mounting center line LD through hole PA Workpiece mounting center line Cylinder mounting center line PB PC MW LC LE Cylinder mounting center line QW PF NX 4 x 2-square nut J PD LB NH NT NW PE PE LW NV Courtesy of Steven Engineering, Inc.-

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

MY3A25 MY3A40 MY3A63 A B C E G H HG JJ KK L LD LL LW M N 55 06.0 18 2 09.5 27 05.0 M4 x 0.7 05.0 065 03.5 22.5 041 06 13.5 M5 x 0.8 75 09.5 25 2 14.0 37 07.4 M5 x 0.8 07.5 095 05.5 27.5 061 08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Cushion seal Tube gasket O-ring O-ring No. 14 15 18 39 40 41 42 43 Qty. 1 1 2 2 2 2 4 2 4 Series MY2H Single Axis Type 16, 25, 40 MY2H G Bore size Stroke PG Q + Stroke (LL) L LA 4-B depth of counter bore C LD through hole 4-MM, depth M Cylinder mounting center line PA Work piece mounting center line U Long hole depth Y Guide center line NX PB PC PF QW X 4 x 2square nut J NT NH PE PD LB NW

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY1H25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M PA P (MY1HG) P (MY1HG) Guide center line PB PD (Hexagon socket head taper plug) (Hexagon socket head taper plug) PP QQ 16 12 LW P QW NW P G NC (Hexagon socket head taper plug) (Hexagon socket head taper plug) 16 Workpiece mounting center line Cylinder mounting center line PE PF PC View B View A GB

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 450, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: TN (NPT), Stroke: 350mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: TN (NPT), Stroke: 450mm, Rod Boot: J (Nylon Tarpaulin), Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: TN (NPT), Stroke: 300mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket)

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 450, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 100mm, Thread: NPT, Stroke: 125mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: Pivot Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 80mm, Thread: NPT, Stroke: 125mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: Pivot Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 100mm, Thread: TN (NPT), Stroke: 125mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 80mm, Thread: TN (NPT), Stroke: 125mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW