Table of Contents

(With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.

MGG

(mm) Stroke range (mm) Bore size (mm) AP AK AL AJ AI N AH M AG L AB K AA J I V B U T O P S A 20 25 32 40 50 75, 100, 125, 150, 200 25 6.6 9 95 82 45 125 25 112 80 11 60 12 55 30 48 108 82 12 99 M6 x 1 depth 9 Rc 1/8 26 30 9 9 108 92 54 150 35 134 100 13 70 16 65 35 57 130 100 109 M6 x 1 depth 13 Rc 1/8 13 31 75, 100 125, 150 200, 250 300 35 9 9 118 102 60 150 35 134 106 16 80 16 73 40 65

C95

W 0 to 0.5s C85 2.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

MGP

4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

MXW

Load factor an Va Item Note CX W Examine W.

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

CA2

MBB50-PS-W MBB50-PS Cushion ring nut Chromium molybdenum steel Quench hard chrome plated @0 MBB63-PS-W MBB63-PS Hexagon socket head cap screw Chromium molybdenum steel Black zinc chromated @1 MBB80-PS-W MBB80-PS Rubber cap Chloroprene rubber @2 MBB100-PS-W MBB100-PS Cap A Black coated Aluminum casted 23A 23B The seal kits consist of items #0, #1, #2, #4 and #6.

ZPT/ZPX

How to Order B01 H N 40 25 ZPT A18 J Pad diameter (mm) Mounting thread 40 50 40 50 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Buffer stroke (Rotating) Pad type H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 100 N S NBR Silicon rubber Spring Force U Urethane rubber 40 to 80 Pad diameter 100, 125 F Fluoro rubber E EPR 6.9

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

MG

4 @1 w @4 !0 y !3 !5 @3 !0 !

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

C85

1 w e !3 !

Table of Contents

0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

MGP

300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Applicable auto switches Lead wire length (m) Auto switch model no.

Applicable Auto Switch Model

(Tolerance 30%) 5.3-11 Reed Switch/Band Mounting D-A33/D-A34/D-A44 Applicable Actuator Series Terminal conduit: D-A3 DIN terminal: D-A4 Series Bore size (mm) CDA1, CDBA1, CDV3, CDVS, CDLA, 40, 50, 63, 80, 100 CE2, CNA CDL1 40, 50, 63, 80, 100, 125, 140, 160 CDS1 125, 140, 160, 180, 200 RHC 20, 25, 32, 40 Specifications PLC: Programmable Logic Controller D-A3 (With indicator light) Terminal

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Air Slide Table Series MXQ

Can be used based on n = + + '+ + ' = 0.25 + 0.022 + 0.011 + 0.17 + 0.24 = 0.693 1 n = + + + n 1 7 Air Slide Table Series MXQ Load weight: W (kg) Overhang: Ln (mm), Corrected value of moment center position distance: An (mm) Work piece mounting coefficient: K Fig. 3 Fig. 1 Fig. 2 Pitch moment Yaw moment Roll moment Table mounting W W My Mp Mr W W W Static moment Dynamic moment L