5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

CA2

MBB50-PS-W MBB50-PS Cushion ring nut Chromium molybdenum steel Quench hard chrome plated @0 MBB63-PS-W MBB63-PS Hexagon socket head cap screw Chromium molybdenum steel Black zinc chromated @1 MBB80-PS-W MBB80-PS Rubber cap Chloroprene rubber @2 MBB100-PS-W MBB100-PS Cap A Black coated Aluminum casted 23A 23B The seal kits consist of items #0, #1, #2, #4 and #6.

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

New

M Conduit terminal 24 VDC With surge voltage suppressor 1/8 3.2 N 100 VAC 1/4 Stainless 5/32 4 steel P 110 VAC 7/32 5.6 Q 200 VAC W 1/8 3.2 X Y 5/32 4 3/8 R 230 VAC 7/32 5.6 S Conduit 24 VDC With surge voltage suppressor C E F 1/8 1/8 3.2 VX2 T 100 VAC 1/8 3.2 U 110 VAC 1/4 5/32 4 V 200 VAC G C37 7/32 5.6 W 230 VAC J 1/8 3.2 K L 3/8 5/32 4 Faston terminal Single 7/32 5.6 3 Size 3 Unit Q

42

Figure shows VV5Q41-08C12SQ-W.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Series SV

100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions,

240

2 e w i !1 t !

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

VFR

Not required (1) VF Non-locking push type Unrestricted 300/50 m/s2 (2) Plug-in type VFR VP4 Dustproof 100, 200 VAC (50/60 Hz), 24 VDC 15 to 10% of rated voltage 5.6 VA/50 Hz, 5.0 VA/60 Hz 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz 1.8 W Conduit terminal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

MNB

Graph (1) 400 st 500 st 600 st 700 st 400 st 500 st 600 st 700 st 10 5 4 300 st 300 st 3 200 st 200 st Load movement time: t(S) 2 [Example] Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 100 st 100 st Example) 1 0.5 0.4 0.3 V' 0.2 V W 0.1 100 200 300 400 500 1000

MNB

Graph (1) 400 st 500 st 600 st 700 st 400 st 500 st 600 st 700 st 10 5 4 300 st 300 st 3 200 st 200 st Load movement time: t(S) 2 [Example] 100 st 100 st Example) 1 0.5 0.4 0.3 V' 0.2 V W 0.1 100 200 300 400 500 1000 Cylinder stroke Maximum speed: V (mm/s) Movement distance of load Find the bore size.

Lightweight and Compact

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Circulating fluid flow rate: Rated flow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

type W, only DC voltage is available.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

Title not found

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Function Coil voltage Dust-tight, Water-jet-proof (IP65) 1 2 3 4 5 6 Symbol Specifications DC AC 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC A (0.4 W) Note 1) Nil Standard B Dust-protected (0.95 W) High-speed response type B (0.95 W) High-pressure type (1.0 MPa) K Note 1) Refer to page 522 for power consumption of AC type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Function Coil voltage Dust-tight, Water-jet-proof (IP65) 1 2 3 4 5 6 Symbol Specifications DC AC 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC A (0.4 W) Note 1) Nil Standard B Dust-protected (0.95 W) High-speed response type B (0.95 W) High-pressure type (1.0 MPa) K Note 1) Refer to page 522 for power consumption of AC type.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Function Coil voltage Symbol Specifications DC (1.0 W) AC 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other (3) Nil Standard type High pressure type (Metal seal only) (1.0 W) (1) K (0.5 W) Low wattage type Y External pilot type (2) R Note) Note 1) Option Note 2) For details about external pilot specifications, refer to page