LG1H

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

IDG

Note) When the symbol C or D is designated, the same part number of an auto-drain listed on page 14-19-33 will come together.

0.4

VQZ 7 6 5 4 3 2 1 n D side Stations U side SQ VFS D-sub> VFR (DIN rail clamp screw) VQ7 BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 (7.5) 20.5 One-touch fitting 13.4 56.9 [1(P), 3(R) port] Applicable tubing O.D.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

CNS

D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160

MLGP

Example Data Theoretical Output Minimum Stroke for Auto Switch Mounting OUT IN (N) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 314 283 251 220 188 157 126 94 63 314 OUT 20 10 236 212 189 165 142 118 94 71 47

MLGP

Example Data Theoretical Output Minimum Stroke for Auto Switch Mounting OUT IN (N) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 283 314 220 251 157 188 94 126 314 63 OUT 20 10 236 212 189 165 142 118 94 71 47

Compact Type

D-A9 (Reed switch) D-F9 D-F9W D-M9 (Solid state switch) D-F9V, D-F9V D-A9V (Reed switch) D-F9V D-F9V (Solid state switch) C3 CXSJ15 to 32 (mm) Bore size C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9, D-F9W, D-M9 D-A9V, D-F9V D-A9 (Reed switch) D-F9 D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9V (Solid

Compact Type Dual-Rod Cylinder Series CXSJ

D-A9 (Reed switch) D-F9 D-F9W D-M9 (Solid state switch) D-F9V, D-F9V D-A9V (Reed switch) D-F9V D-F9V (Solid state switch) C3 CXSJ15 to 32 (mm) Bore size C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9, D-F9W, D-M9 D-A9V, D-F9V D-A9 (Reed switch) D-F9 D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9V (Solid

XL

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

Modular Design with Uniform Body Style

Flow rate [L/min (ANR)] 62 AF20-D to AF60-D Series Working Principle: Float Type Auto Drain N.C. type: AD37-D, AD47-D N.O. type: AD38-D, AD48-D Compact auto drain N.C. type: AD27-D q r e w t i u y o !

KN Series Nozzles for Blowing

flats H1 H2 Weight (g) Connection thread KNK-R02-400 KNK-R02-600 KNK-R03-400 KNK-R03-600 KNK-R04-400 KNK-R04-600 32 32 40 40 54 54 31.9 31.9 32.4 32.4 34.1 34.1 38 38 39 39 42.2 42.2 17 17 17 17 22 22 17 17 17 17 17 17 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 4 6 4 6 4 6 35 D H2 H1 L1 A 8.5 Reference dimensions after R thread installation.

Air Slide Table

Reed auto switch: D-A9, D-A9V Solid state auto switch: D-M9(A), D-M9W D-M9 Compact auto switch D-A9 5 Air Slide Table MXQ Series Functional Options ' With buffer mechanism Protects workpieces and tools by eliminating impact at the extension stroke end Buffer unit is auto switch capable.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

5

L LV LX D C Axis LR R +0.15 +0.05 0.040 0.076 LC hole H B (mm) Part no.