High Vacuum Angle Valve, XL Series Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.
q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Component Parts Material No.
Temperature distribution of 120C specifications Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 140 e, r, t Comparison with KF25 flange 120 e Body 1 100 Temperature (C) 80 r Body 2 q, w t Body 3 60 40 20 w Bellows Valve q 0 0 30 60 90 Heater Time (minutes) High Vacuum Angle Valves
OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.
E TH TF WF LF + Stroke UF ZJ + Stroke A Bore Size (in) MM KK A B E EE FB LF+ P+ R TF TH UF W WF ZJ+ 500 (5") 1.000 3/4-16 1.13 1.500 5.50 1/2 NPT .50 4.50 2.88 4.10 6.63 2.75 7.63 .75 1.38 5.88 600 (6") 1.375 1-14 1.63 2.000 6.50 3/4 NPT .50 5.00 3.13 4.88 7.63 3.25 8.63 .88 1.63 6.63 MF2 Head side rectangular flange (G) P + Stroke 4-FB 2-EE KK MM B R E TH WF LF+ Stroke TF ZJ + Stroke UF
Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H J
Assembly 1) Pass the cable u through the cable gland r, plain washer t and rubber seal y in this order and connect to the terminal block e. Then, mount the terminal block e on the housing w.
E E D C Center of body Center of body B C B (Excludes the Y300T-D) EE Part no.
Pressure gauge unit 2) e 2P 3P 4PL r t Sample Order Number Port Unit psig/bar MPa Code qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) AK1202S e q 8 8 8 8 w 8 8 8 8 r r No code MPA q w 2P 3P 4PL 5PC MPA MPA MPA V3 V3 V3 2) Pressure gauge unit MPa or psig/bar selectable.
r p g n i t a r e p o . x a M ) 7 . 0 ( 0 0 1 g i s p * e g n a r g n i t a r e p o l a i t n e r e f f i d e r u s s e r P ) a P M ( ) 6 . 0 ~ 1 . 0 ( 0 9 ~ 5 1 e g n a r . p m e t g n i t a r e p O F 0 4 1 ~ 0 4 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T l w o B e t a n o b r a c y l o P T L A N k n a T d e e F o t u A 5 T L A N 1 * S 1 5 T L A
Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.
suppressor Nil F S Manifold block Z Nil None With manifold block MN (20 stations maximum) Number of ejector/valve stations Alignment (for special specifications) n r e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.
Unit psig/bar MPa Code r e No code MPA Sample Order Number Port qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q AZ1402TS e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 3) Pressure gauge unit MPa or psig/bar selectable.
Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type
Description No. t y NBR Stainless steel Material Note Spool/Sleeve Body Platinum silver Gasket Return spring w e r Polyacetal Piston O-ring u NBR Seal i NBR O-ring o NBR O-ring !0 NBR Mini Y seal !1 Carbon steel Round head combination screw NBR Aluminum die-casted Sub-plate Platinum silver Sub-plate Assembly Part No.: VZ200-S-01 !2 Carbon steel Round head combination screw !
Bore si~e ~ Standard stroke (mm) .
3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6