3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Note) For the special voltages, please consult with SMC. 4-14-33 Base Mounted 34 Series VQZ100/200/300 How to Order Manifold: VQZ200/300 VV3QZ 2 5 08 C6 C D Series Option 2 3 VQZ200 VQZ300 Nil None DIN rail mounting style (With DIN rail in standard length) DIN rail mounting style (Without DIN rail ) External pilot specifications D DO R Note) Manifold Note) Order DIN rail separately.

SZ3000

A 4 (B) 2 (A) 4 B 2 Manual override A SOL.b SOL.a 3 (R) 5 (R) Nil: Non-locking push type D: Push-turn locking slotted type 1 (P) 4 position dual 3 port valve: N.O./N.O. (B) 2 (A) 4 B SOL.b SOL.a 5 (R) 3 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

3 Port Air Operated Valve Series SYJA300

1/4 (P, R port) 1/8 (A port) (Pitch) P=19 21 Manual override Approx. 300 (Lead wire length) (Station 1) (Station n) (Light/Surge voltage suppressor) + + + + 67 [74] 51.6 35 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 63.5 63.5 63.5 63.5 X X X X P P P P 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 R R R R 90.2 Max. 10 91.1 Pg7 78.1 [85.1] Approx. 300 (Lead wire length

CY1

Note 2) D-Z73, D-Z76, D-Z80 D-F79, D-F7P, D-J79 D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) D-F9N, D-F9P, D-F9B Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for CY1R6 to 20.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

1/4 (P, R port) 1/8 (A port) (Pitch) P=19 21 Manual override Approx. 300 (Lead wire length) (Station n) (Station 1) (Light/surge voltage suppressor) + + + + 67 [74] 51.6 35 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 63.5 63.5 63.5 63.5 X X X X P P P P 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 R R R R 90.2 Max. 10 91.1 Pg7 78.1 [85.1] Approx. 300 (Lead wire length

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(R)wYwC4, C6, M5 L plug connector (L): VQZ222 (R)wLwC4, C6, M5 VZS Indicator light VFS 135 <137> 300 VS (Lead wire length) 67.5 <68.5> VS7 32 <35.5> Pg.7 142.5 MAX.10 71.5 Applicable cord O.D.

LEC-OM07605CN

STO 13.4 13.2(I/O) 13.4.1 (1) DI-1 () STO 1 STO 2 5mA 3.0k STOCOM TR DC24V 10% V CES 1.0V 300mA I CEO 100A (2) DO-1 ON (D) (R) (:40mA:50mA:100mA) 5.2V (a)TOFB 2 STO TOFB1 TOFCOM () 24VDC10% 300 mA TOFB2 . (2.6V)( 26.4V) 13. STO (b)1 TOFB 2 STO TOFB1 TOFCOM () 24 V DC 10% 300 mA TOFB2 . (5.2 V)( 26.4V) 13.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Aluminum High Vacuum Angle Valve

Symbol Nil Auto switch model r Auto switch type t Number of auto switches/Mounting position Mounting position Valve open/closed Valve open Valve closed Quantity Remarks Without auto switch (without built-in magnet) Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Without auto switch 2 pcs. 1 pc. 1 pc.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling

0.4

R port R port P port P port A, B port A, B port Type of connection Type of connection VV5Q11 VV5Q21 381 A VQ1000/2000 Series Kit (D-sub connector) F VV5Q11 VV5Q21 D-sub connector reduces installation labor for electrical connections.

Table of Contents

1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 29.4 35.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L2 L3 D1 L1 H T Max.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Note 3) Weight without sub-plate 2.10-6 VQZ100/200/300 Body Ported Construction VQZ100 Poppet e w q Component Parts SY Material No. q Description Notes N.C. Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Compressed Air Preparation Filter

E G J M N Q R S T U V B AFF20-D/AM20-D/AMD20-D 1/8, 1/4 40 142.3 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 159.6 AFF30-D/AM30-D/AMD30-D 1/4, 3/8 53 178.1 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 219.8 AFF40-D/AM40-D/AMD40-D 1/4, 3/8, 1/2 70 223.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 263.3 AFF50-D/AM50-D/AMD50-D 3/4, 1 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

ports) Applicable tube O.D.: 8 24 13.3 (Pitch) P = 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 PE 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 43.7

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Vacuum Unit

pages 11 and 12, and r on page 13.)

4/5 Port Air Operated Valve Series SYJA3000

Type S31 Manifold: Side Ported 91.7 [96.1] Approx. 300 (Lead wire length) SS5YJ3-S31Stations -M3 L1 L2 3.5 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 52.2 [54.4] 51.4 [53.6] 17.3 30 3 91.7 [96.1] 78.8 [83.2] 78.8 [83.2] 13.5 A A A A A B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4 [53.6] 52.2 [54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting)