Specification: 11- (Clean Series, Vacuum Type), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: CS (Metal Stopper Extension End), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: Clean Series, Vacuum Type, Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: L (3m)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

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COM. () 20 COM.

Table of Contents

How to Order MHZ Bore size MHF MHS 3 D 20 16 to 25 M9N MHL Number of auto switches MHR Nil S 2 pcs. 1 pc.

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

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20 20 1.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

ISO Cylinder

GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25

Table of Contents

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.