A

3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/

VFS

Rc EA, EB Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Pilot EXH port M5 x 0.8 G (PF) 1/4 Electrical entry Bottom Ported Size 5-bottom ported size (Refer to the below right.)

Fluoropolymer Piping Equipment

8" 1" x 7/8" 3/4" x 5/8" 3/4" x 5/8" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 3/8" x 1/4" 1/8" x 0.086" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 3/8" x 1/4" 1/4" x 5/32" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3

Electric Actuator with Integrated Guide

200W With brake Nil 1 2 3 4 5 6 7 A B Without switch and switch rail Photo micro sensor 1 pc., Photo micro sensor rail 1 pc.

MY1

1 !2 !3 !4 !5 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

7 @1 e r t !1 !2 @8 !6 o A !5 @7 A !0 @2 @4 @5 @6 !4 !3 A-A w * Motor bottom mounting type is the same. Component Parts No. Description Material Note No.

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

ISO Cylinder

Nil 2 S 1 n n A Rail mounting B Band mounting Head cover type *1 The symbol is Nil for no magnet.

Fieldbus System

valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) A 1 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

15

Description 2 Ring 1 1 1 2 Ring 1 3 Hub (Motor side) 1 1 1 1 1 1 3 Hub (Motor side) 1 1 4 Hexagon socket thin head cap screw 1 1 1 1 1 1 4 Hexagon socket thin head cap screw 1 1 5 Hexagon socket head cap screw 4 4 4 5 Hexagon socket head cap screw 4 840 LEJS Series Auto Switch Mounting Auto Switch Mounting Position (C) B (Table center) LEF LEJ LEL LEM LEY LES A LEPY LEPS [mm] LER

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A Without auto switch B P A B P Q Q With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 5 st 10 st 20 st 20 st 20 st 20 st 5 st 10 st 32 40 50 Rc 1/8 40 46.5 M5 x 0.8 11.5 11 50 56.5 28 34.5 38 44.5 Rc 1/8 Rc 1/8 Rc 1/4 10.5 11 10.5 50 56.5 68.5 10.5 11 10.5 60 66.5 68.5 43 49.5 50.5 33 39.5 40.5 78.5 10.5 88.5 60.5 50.5 Rc 1/8

Table of Contents

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

CRB2/CRBU2/CRB1

Model b (h9) h (h9) L W P 20 4 0.030 0 4 0.030 CRB1BW 500 PORT 25 5 0.030 5 0.030 CRB1BW 630 0 36 5 0.030 5 0.030 CRB1BW 800 0 4-T 40 7 0.036 7 0.036 0 0 CRB1BW100S F Free-Mounting Type CRBU2 CRB2 L CRB1BW-SE, CRB1BW-DE E1 K Key length B port B port D B C G U G U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

VQ4000

(A) 4 (B) 2 (A) 4 (B) 2 VQZ 3 1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !1 o !5 (Short shaft side) For size 40 (Short shaft side) (Short shaft side) Component Parts Description Material Note Description Material Note No. !0 !1 !2 !3 !4 !5 !6 !7 !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

CQ2

0.043 Note 1) Front boss mount is optional specification.