IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

CLS

Weight reduction has also been realized through parts simplification (Max. 40% compared to previous series). 125 140 160 180 200 250 Maximum 1600 Cylinder with lock Series CLS Single rod Series CLS Double acting Maximum 2000 Maximum 2400 9-9-1 2 Series CLS Specific Product Precautions 1 Be sure to read before handling.

MY1

The spacing (l ) of the support must be no more than the values shown in the graph on the right. 200 190 (kg) m 180 170 160 l 150 140 (2400) (2400) (2400) (2400) (2400) (2400) 130 120 Weight (m) m l 110 Caution 100 (2000) (2000) (2000) (2000) (2000) (2000) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

0.5

400 800 1200 1600 2000 2400 2800 Installation distance [mm] Installation distance [mm] With adjustable louver: Angle setting 5, Air flow level: 10 With adjustable louver: Angle setting 5, Air flow level: 10 IZF21-W IZF31-W 300 mm 300 mm 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 300 mm 300 mm 0 400 800 1200 1600 2000 0 400 800 1200 1600 2000 2400 2800 Installation distance [mm] Installation distance

Thermo-chiller/Rack Mount Type

50/60 Hz) Concentration meter HRR012 1000/1200 400/500 (100 V type) 450/500 (200 V type) Air-cooled refrigeration With electric conductivity control function, Applicable to DI water piping HRR018 1600/1800 Watercooled refrigeration Particle filter element for replacement (UL Standards) Applicable to DI water piping Air-cooled: Option U (Water-cooled: Standard) HRR024 2000/2400

EX245-FPS1_2_3_eng

SF and BF Indicators Yes Over current detection 2 DI (Input signal "n+4") FS LED 3 1 BF SF Description 3 0V (US1) Fieldbus Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result.

EX260-SPR-A_eng

V +24 V for SI unit operation LED Description 8 Mounting hole Mounting hole for connection to the valve manifold SI0 V 0 V for SI unit operation 4 SF System fault 5 Unused Accessories BF BUS fault Hexagon socket head cap screw 2 pcs.

EX600-SPRA_eng

Red SF LED is On x10 x1 LED display LED display Off Off URL http://www.smcworld.com PWR(V) Display ST(M) PWR BF Displays bus fault. SF for 2 hours each in direction X, Y and Z respectively (De-energized) Displays system fault. Displays the status of the power supply voltage for outputs. Displays the status of the power supply voltage for control and inputs.

Series VQ Base Mounted Metal Seal/Rubber Seal

Item Specifications 24V DC, +10%, 5% External power supply Current consumption (Internal unit) SA, SB, SD, SE, SF, SG, SJ, SK, SQ, SR: 0.1A SC: 0.3A How to Order Manifold VV5Q 08 C6 12 D XP A S Dust proof styel (-XP)(VQ1000 only) Suffix -XP for the dust proof SI unit. (Except for SE, SG and SQ.)

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

13.5 29.5 XB effective depth XC WF 2 29h8 29.5h8 14H8 9.7 15.5 33.5 3 34h8 33h8 17H8 9.7 15.5 36 7 40h8 39h8 20H8 9.5 16.5 39.5 BD BA PA Vacuum suction port Side port 2 x P 2 x JC DD Depth from bottom (not including JD) JE D (Plugged with a hexagon socket set screw when front ports are used) Effective depth FB DE 2 x JU FD BC FA AW H Q Effective depth 1.2 (UU) SD BH AY BK JD BG AX 2 x P SF

Cylinder (Tube) Inner Diameter(φ): 4", Stroke(mm): 24", Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: -, Environment, Applications: Standard, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Custom-made Specifications

Magnet: D (Built-in), Mounting: F (MF1, Front Flange), Bore Size: 400 (4"), Stroke: 2400 (24"), Air Cushion: Both Ends (Air Cushion), Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC6 (Stainless Steel Rod)

Magnet: D (Built-in), Mounting: F (MF1, Front Flange), Bore Size: 400 (4"), Stroke: 2400 (24"), Air Cushion: Both Ends (Air Cushion), Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC6 (Stainless Steel Rod)

Magnet: Built-in, Mounting: MF1, Front Flange, Bore Size: 4", Stroke: 24", Air Cushion: Both Ends (Air Cushion), Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Cylinder (Tube) Inner Diameter(φ): 4", Stroke(mm): 24", Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: -, Environment, Applications: Standard, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Custom-made Specifications