Speed Controller with

D6 Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D L18 L19 L20 18.2 18.6 22 27.2 28.1 L21 23.2 23.6 27 32.2 33.1 L22 11 12.6 17 22 28 L23 L24 18 19.6 25.8 30.8 36.8 L25 t2 Part no.

Speed Controller with

Applicable model AS-10D AS1002Fm AS-20D AS2002Fm AS-25D AS2052Fm AS-30D AS3002Fm AS-40D AS4002Fm eThreaded stud kit for manifold e Threaded stud kit for manifold wDIN rail mounting bracket qL-bracket Prepare DIN rail by user. e Threaded Stud Kit for Manifold: Metric Size Details of Threaded Stud Kit for Manifold Threaded stud Accessories Part no.

MNB

-X Auto switch Bore size (mm) 40 32 50 63 80 100 20D-A5/A6 D-J5/F59F BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Data D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV BMB4 -032 BMB4 -032 BMB4 -050 BMB4 -050 BA4 -063 BA4 -063 BMB3T -040 BMB3T -040 BMB3T -050 BMB3T -050 BMB3T -080 BMB3T -080 D-P5DWL [Mounting screws set made of

OMR0032

Controller side I/O HIF6-20PA-1.27DS connector Cable: Hirose Electric HIF6-20D-1.27R or equivalent B10 A10 Cable: Hirose Electric HIF6-20D-1.27R or equivalent 7.2 Parallel I/O specifications Output specifications Input specifications (NPN and PNP common, (NPN, PNP common) pulse input terminal is excluded) Item Specifications Item Specifications Output circuit Optically isolated open collector

CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

CV/MVGQ

Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 105 + 40 95 + 40 n = 4, 8, 12, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69

Angle Seat Valve /

Test range Thermometer Test equipment Pressure tap Pressure tap Throttle valve on the upstream side Flow meter Throttle valve on the downstream side 2d 6d 20d 10d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 12 VXB Series Flow Rate Characteristics Note) Use this graph as a guide. If an accurate flow rate is required, refer to pages 8 to 12.

7

VXZ VXS VXB Test range Thermometer VXE Equipment for test Pressure tap Pressure tap VXP VXR Throttle valve in the downstream side Flow meter Throttle valve in the upstream side VXH 2d 6d VXF 20d 7d VX3 Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005-2-3 VXA 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50 40

New

Test range Thermometer Equipment Pressure Pressure for test tap tap Restrictor Flow Restrictor on the 2d 6d on the meter downstream side upstream side r 20d r 10d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 32 Series VXN Flow-rate Characteristics Note) Use this graph as a guide. In the case of obtaining an accurate flow rate, refer to pages 28 through to 32.

3

VXZ VXS VXS VXB Test range Thermometer VXE Equipment for test Pressure tap Pressure tap VXP VXR Throttle valve in the downstream side Flow meter Throttle valve in the upstream side VXH 2d 6d VXF 20d 7d VX3 Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005-2-3 VXA 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50

CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

CV/MVGQ

Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 105 + 40 95 + 40 n = 4, 8, 12, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69

RHC

(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1

CA2

100 110 130 160 180 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 94 100 108 126 136 84 90 98 116 126 C76 M8 x 1.25 9 M18 x 1.5 M10 x 1.25 11.5 M18 x 1.5 C85 M12 x 1.75 13.5 M22 x 1.5 M12 x 1.75 13.5 M26 x 1.5 C95 CP95 Head Side Flange Style: CA2GQ NCM NCA 4-FD D4-J 2-P (Rc, NPT, G) B1 G G MM Width across flats KA -X 20D

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4.5 24.5 27 27.5 20.5 15.5 17.5 19.5 16 25 9 3 6 8 4.5 27 29.5 30 20.5 15.5 17.5 19.5 16 NCM 32 10 4 7 9 5.5 30.5 33 33.5 21.5 15.5 18.5 20.5 17 40 14.5 8.5 11.5 13.5 10 35 37.5 38 23.5 19 20.5 22.5 19 NCA 50 17 11 14 16 12.5 40.5 43 43.5 28.5 22.5 25.5 27.5 24 63 17 11 14 16 12.5 47.5 50 50.5 28.5 22.5 25.5 27.5 24 DOperating Range -X Auto switch model Bore size (mm) 20 25 32 40 50 63 20D-C7

1

Copper-free specifications (20-) Shows the products for copper-free with prefix 20-. 20Example) Copper-free specifications 20-CQ2B12-20D Data Copper-free 2. For the detailed dimensions, refer to each series catalog. 3. Please contact SMC for directional control valves, air line equipment, air preparation equipment and others.

MB

56.5 53.5 60.5 53.5 53.5 C85 125 66.5 66.5 71.5 70.5 67.5 125 76.5 72 115 68.5 65 72 65 65 C95 Operating Range CP95 (mm) Auto switch type Bore size 32 40 50 63 80 100 125 NCM D-Z7/Z80 13 10 17 7.5 8.5 7.5 9.5 9.5 10.5 9 9 10 11 11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 -X D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 20D-F5

Table of Contents

-X Centering can be done easily. 13 18 + Stroke 33 20Tolerance h9 8 Rod cover Data CDUJB8-15D 21 13.5 18 + Stroke 38 Compliant for clean room Clean Series 10 CDUJB10-20D 1011-Series CUJ 22 Two auto switches can be installed even for 4 mm strokes. CU Length is shortened by approx. 64% max. Volume is reduced by approx. 70% max.

CUJ

-X Centering can be done easily. 13 18 + Stroke 33 20Tolerance h9 8 Rod cover Data CDUJB8-15D 21 13.5 18 + Stroke 38 Compliant for clean room Clean Series 10 CDUJB10-20D 1011-Series CUJ 22 Two auto switches can be installed even for 4 mm strokes. CU Length is shortened by approx. 64% max. Volume is reduced by approx. 70% max.

CNS

D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160 D0 0 2 2 4.5 4.5 9.5 9.5 134.5 144.5 89 87.5 88 87.5 -X Operating Range 20D-Z7