Electric Actuators

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through Refer to Cross section C-C, bottom view.

Table of Contents

0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Compact 5-Port Solenoid Valve

Can be connected with the ZK2 series vacuum unit p. 7 JSY3000 JSY3000 Ejector System JSY1000 JSY5000 Vacuum Unit ZK2 JSY1000/3000/5000 Series CAT.ES11-110B a Plug-in Compact 5-Port Solenoid Valve JSY1000/3000/5000 Series Series Map JSY1000 JSY3000 JSY5000 Valve width 39% reduction 36% reduction 35% reduction 6.4 mm b 10 mm 10 mm b 15.5 mm 15 mm b 24.6 mm 29% reduction 32% reduction 59% reduction

LJ1H

0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

CATALOG

) C8 One Touch Fitting for 8 (VQZ2000/3000) C10 One Touch Fitting for 10 (VQZ3000) M5 M5 Thread (VQZ2000/3000) 01 Rc(PT)1/8 (VQZ2000) 02 Rc(PT)1/4 (VQZ3000) CM Mixture of Port Size (VQZ1000/2000/3000) When ordering Port Mixture and/or with Port Plug, suffix it in Manifold Specs.

Electric Actuator with Integrated Guide

Model Allowable Moment (Nm) Allowable dynamic moment Model Mounting orientation Load movement direction LTF6 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) Pitching 100 m a=1000 a=2000 a=3000 L1 30 20 10 0 Transfer load m (kg) L2 200 a=1000 a=2000 a=3000 Mer L2 (mm) Rolling Yawing 100 m L2 Mer 30 20 10 0 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100

LJ1H

0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale: 15% 10 6 Work piece mounting reference plane

Integrated Controller

1000 1200 1400 3000 mm/s2 2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 1.5 1 0.5 5000 mm/s2 10 mm/s2 0 1400 200 400 600 800 1000 1200 0 Speed: V [mm/s] Speed: V [mm/s] EQFS25HA/Ball Screw Drive Horizontal/Lead 12 Vertical/Lead 12 35 9 8 7 6 5 4 3 2 1 0 3000 mm/s2 30 Work load: W [kg] Work load: W [kg] 3000 mm/s2 25 20 15 10 10 mm/s2 5000 mm/s2 5 0 0 0 Speed: V [mm/s] 100 200 300 400

Electric Actuator/Slider Type

T1 = V/a1 = 300/3000 = 0.1 [s], a1 a2 T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] Time [s] T2 = L 0.5V(T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

VQZ1000/2000/3000

Note 2) Applicable to VQZ2000 and 3000.

2

Example) IS10M-30-6LP Symbol Description V q Body size 20 30 40 50 60 a Set pressure range Nil 0.1 to 0.4 MPa 6 Note 1) 0.1 to 0.6 MPa Semi-standard + Nil 0.5 m b Lead wire length V w L 3 m 23 15 Z 5 m (13) + c Pressure unit of the scale plate Nil MPa (23) (5000) (3000) (500) P Note 2) MPa/psi dual scale Note 1) Set pressure range of 6P (L, Z) is 0.2 to 0.6 MPa (30 to 90 psi).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

LX

) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 Phase Stepper Motor

15

3000 Motorless Motorless Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders.

Single Axis Electric Actuator Series LJ1H

0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 3000 a = 2000 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 44

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 46 Non-standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101NB(X10) Scale: 15% 10 6 Work piece mounting reference

Battery-less

Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 Sequence 1: Servo ON instruction Sequence 2: Instruction to return to origin Sequence 3: Specify step data No. 0 to input the DRIVE

V

) C8 One Touch Fitting for 8 (VQZ2000/3000) C10 One Touch Fitting for 10 (VQZ3000) M5 M5 Thread (VQZ2000/3000) 01 Rc(PT)1/8 (VQZ2000) 02 Rc(PT)1/4 (VQZ3000) CM Mixture of Port Size (VQZ1000/2000/3000) When ordering Port Mixture and/or with Port Plug, suffix it in Manifold Specs.

JXCx-OMU0004

800 3000 520 3000 1200 3000 1000 3000 300 3000 52 No.JXC-OMU0004-A 10.2 LEH LEH LEHF LEHS,Z [mm/s] 10 2] 2000 [mm/s [mm/s] 5 10 5 2] 1000 [mm/s [mm] 1 1 LEHF 3 5mm/s LEHF10 LEHF20 LEHF32 LEHF40 3 11 48 72 5 19.5 84 126 [N] 7 28 120 180 * LEHF10 30%F.S.LEHF20 25%F.S.LEHF3240 20%F.S.

2 Phase Stepper Motor/Without Motor Brake Series LXS

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through Refer to Cross section C-C, bottom view.