Table of Contents Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 VBA 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 VE VY1 26.1 3 R, NPT 1/8 13.6 18.3 G 26.1 PPA AL 14-4-13 1 Compact Manifold Regulator Series ARM10/11 F.R.L.
x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5.1 NM2 M4 x 12 2.5 10 12 Hexagon socket head cap screw/set screw Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 (for hub fixing)* 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 * For screw sizes, refer to the hub
Parallel I/O Connector I/O 2 Wiring example NPN JXC73 PNP JXC83 24 VDC BUSY1 24 VDC +COM3 Load Load 10 BUSY1 10 +COM3 1 1 Load Load BUSY2 30 BUSY2 30 +COM4 +COM4 21 21 Load Load BUSY3 11 BUSY3 11 N.C. 1 N.C. 1 2 2 Load Load BUSY4 31 BUSY4 31 N.C. 1 N.C. 1 22 22 Load Load AREA1 12 AREA1 12 N.C. 1 N.C. 1 Load Load AREA2 32 AREA2 32 3 3 Load Load AREA3 13 AREA3 13 N.C. 1 N.C. 1 23 23 Load Load
socket head taper plug) (mm) Bore size (mm) G 16 GB 24.5 NC 21 P PP 13 QQ 16 RR 19 SS 3.5 TT 15.5 UU 16 VV 16 WW 11 XX 38 ZZ Rc 1/16 25 32 40 Rc 1/8 19 30 26 Rc 1/8 18 16 24 4 21 16 19 13 48 Rc 1/16 23 36.5 32 Rc 1/4 16.5 26 25.5 10.5 22.5 24.5 23 20 54 Rc 1/8 "P" indicates a cylinder supply port.
Refer to page 11-1-29 for further information.
AC20A-D 1/8, 1/4 1/8 83.2 87.6 71.8 41.6 60 21 5 30 24 33 5.5 11.5 3.5 29 38 AC30A-D 1/4, 3/8 1/8 110.2 115.3 86.5 30 55.1 80 26.5 3.5 41 35 7 14 6 42.5 42.5 AC40A-D 1/4, 3/8, 1/2 1/8 145.2 147.1 91.5 38.4 72.6 110 35.5 50 40 55 9 18 7 50 65 AC40A-06-D 3/4 1/8 155.2 149.1 93 38.4 77.6 110 35.5 50 40 55 9 18 7 50 65 AC50A-D 3/4, 1 1/8 191.2 234.1 155 98.1 110 45 70 50 70 11 20 8 60 80
10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.
Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5
8 52 41 D-9 5 23 Reed switch D-A73C D-A80C 12 54 D-9lA 9 47 Reed switch 2 wire D-A79W 11 53 10 47 D-E7lA D-E8lA 2 wire 3 wire D-J7 11 50 11 55 3 wire 2 wire 13 57 9 49 D-Z7 D-Z8 Solid state switch D-F7 4 wire 3 wire 13 56 10 55 2 wire 1 D-J79C 13 52 9 50 3 wire color 10 53 D-Yl 2 wire 2 11 54 3 wire color 11 54 2 wire 14 53 D-M5 Solid state switch 3 wire 16 60 D-Y7BA 54 1 2 wire 6 31 color
: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14
3.5 29 AC30A-B 1/4, 3/8 1/8 110.2 115.1 85.6 30 55.1 80 29.4 3.5 41 35 7 14 4 41 AC40A-B 1/4, 3/8, 1/2 1/8 145.2 147.1 91.7 38.4 72.6 110 33.8 1.5 50 40 9 18 5 48 AC40A-06-B 3/4 1/8 155.2 149.1 93.2 38.4 77.6 110 33.8 1.2 50 40 9 18 5 48 AC50A-B 3/4, 1 1/8 191.2 220.1 175.5 93.1 110 43.3 3.2 70 50 11 20 6 60 AC60A-B 1 1/8 196.2 234.1 175.5 98.1 110 43.3 3.2 70 50 11 20 6 60 Optional
T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08
, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50, #3 (#1+#3+#11) MUF63SMU63, #3 (#1+#3+#11) Single clevis Double clevis Double clevis Single clevis Double clevis MUD25SMU25, #6 (#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11) MUD40SMU40, #6 (#1+#6+#11) MUD50SMU50, #6 (#1+#6+#11) MUD63SMU63, #6 (#1+#6+#11) (mm) Rotation() 100 90
10-SYJ3233 1/8 10-SYJ3 M5 x 0.8 3 position 58 56 66 10-SYJ3433 10-SYJ3533 Note 1) Dedicated for manifold base, refer to page 11 for details.
M14 x 2 M27 x 2 38 6.5 140 140 112 35.5 35 27 19 27 16 34 35 100 160 43 100 17 110 279 18 140 197 M16 x 2 M33 x 2 42 9 174 174 140 45 38 36 22 28 18 38 40 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100 13 340 1/2 66 140 12 20 16 47 125 15 340 1/2 77 140 12 20
XLF-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.
8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1 1 flange 0.38 0.55 0.9 1.4 2.1 4.2 10.5 50 52 72 87 Weight (kg) JIS Symbol Note) Max. flow is at 0.7 MPa.
(inch) Weight (g) Model d L M2 M1 Applicable tubing Applicable KQ2N01-03 KQ2N01-05 KQ2N03-05 KQ2N03-07 KQ2N05-07 KQ2N05-09 KQ2N07-09 KQ2N07-11 KQ2N09-11 KQ2N09-13 KQ2N11-13 36.5 37 37.5 38 38.5 41 41.5 45 46.5 47.5 50 16 16.5 16.5 17 17 18.5 18.5 21 21 22 22 0.2 0.4 0.4 0.6 0.6 1 1 1 11 22 24 5 32 15.5 2.2 1 8 tubing 3 16 3 16 5 32 16 2.5 1 4 1 4 16.5 3.5 3 16 5 16 5 16 1 4 17 4.6 3 8 3
With External Pilot Specifications Ground terminal 46.5 (Pitch) 23.5 21.3 P = 20.5 18 11 16.5 2-M12 17.7 11.6 13.5 SV 36.1 83.8 5 37.6 42.7 3 3 PWR 3 3 3 5 PWR T T 3 5 E E 3 5 E 3 5 4 A E 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 60.3 2 2 2 2 76.8 SZ 1 1 1 1 BUS 4632 BUS 4632 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4632 4632 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing
XLF-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.