Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Air Cylinder Series CA2

0 4 2 11.5 9.5 8 10 3.5 1.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 12.5 11.5 8.5 7.5 6 5 5.5 4 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 12 10 16 14 9.5 7.5 9 7 6 4 6.5 4.5 4.5 12.5 8 6 10 8 17.5 15.5 16.5 13.5 12.5 17.5 11 10 10.5 9 7.5 6.5 8 7 14 13 9.5 8.5 11.5 10.5 19 18 D-A9 and D-A9V types cannot be mounted on 50.

CA2

2) n = 2, 4, 6, 8 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 Different sides With n 100 + 100(n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n2), n = 2, 4, 6, 8 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 20 + 35(n 2) n = 2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n =

Magnetically Coupled Rodless Cylinder

26 25 25 NN S 62 63 83 106 111 124 150 176 188 V T C 8 14 14 26 32 32 41 F 8 9 10 13 13 16 16 2 2 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 A 4 4 4 8 8 8 10 Model CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

Mechanically Jointed Rodless Cylinder Series MY1

5.5 Technical data 52 77 14 129 15 26 73.2 13 (Max.38) 6 5.5 1075 Series MY1W Side Support Side support A MY-SA 2 x G 2 x H E E F A B C D Side support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A 61 71.6 15 26 4.9 3 6.5 3.4 M4 x 0.7 B MY-S20A 67 79.6 25 38 6.4 4 8 4.5 M5 x 0.8 B MY-S25A 81 95 35 50 8 5 9.5

Electric Actuator

X Y LS + Stroke LS1 13 Electric Actuator/Rod Type Series LEY Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) AC Servo Motor Specific Product Precautions Model Selection Rod flange/LEY16ll -lllF A B C Head flange/LEY16ll -lllG A B C LL FV FV FX FZ 2 x FD FT 2 x FD FZ FX FT A B C Head flange/LEY25ll -lllG Rod flange/LEY ll -lllF 25 32 A B C Head flange is not available for LEY32.

Table of Contents

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) ( ): denotes without sub-plate. 10-SY5000 Flow rate characteristics Note 1) Weight (g) Note 2) Valve model Actuation type 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size L plug connector, W M8 connector C (dm3/(sbar)) Cv b b C (dm3/(sbar)) Cv Grommet DIN terminal M plug connector 121 (58) 139 (76) 123 (61) 144 (81) 154 (92) 186 (123) 127 (65) 152 (89) Single Double 2 position 2.4

Air Cylinder

MM GA NDh8 D MM NN GA Piping port 2 x M5 x 0.8 NN C D B 0 0.3 Z + 2 x Stroke S + Stroke H NA F A NA F H + Stroke A B 0 0.3 Stroke With air cushion: CJ2WB 10 16 AZ Mounting nut WA WA Rod end nut 45 GA Piping port 2 x M5 x 0.8 GA C B 0 0.3 NA NA B 0 0.3 Z + 2 x Stroke S + Stroke For details of the mounting nut, refer to page 63.

CL

M10 X 1.25 M12 X 1.75 M12 X 1.75 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 1/4 3/8 3/8 1/2 1/2 8 11 11 13 16 With rod boot CLAL40SCLA40, #2 (#1+#2+#11) CLAL50SCLA50, #2 (#1+#2+#11) CLAL63SCLA63, #2 (#1+#2+#11) CLAL80SCLA80, #2 (#1+#2+#11) CLAL100SCLA100, #2 (#1+#2+#11) Without rod boot Bore (mm) l 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke Y h 59 66 66 80 81 f 11.2 11.2

Combination Cylinder

C shape 8 for axis C shape 10 for axis C shape 10 for axis NT-02 NT-03 NT-G04 C shape 8 for axis C shape 10 for axis 13 17 19 20 25, 32 40 15.0 19.6 21.9 12.5 16.5 18 M8 M10 X 1.25 M14 X 1.5 5 6 8 20 IY-G02 0.040 0.076 8 CD-G02 16.2 20 21 7.6 1.5 0.9 0.040 0.076 8 0.9 7.6 38.6 43.4 1.5 IY-G03 0.040 0.076 10 0.040 0.076 10 CD-G25 20.2 25.6 1.55 25, 32 9.6 1.15 9.6 42.6 1.55 1.15 25 48 C shape

MY1

4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM40-15AA5905 GMY40 RCS-12 TMY-40 C-4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 2 2 2 2 2 4 Note) Two types of dust seal band are available

CRB2/CRBU2/CRB1

Stopper ring Block (C) Stopper ring Block (D) Block (D) Block (C) Counterclockwise 2-2> Counterclockwise 2> The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation to end of rotation .

Table of Contents

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Stopper ring Block C MSU CRJ CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise 2-2> 2> MSQ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation q to end of rotation w.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

0.4

N.O. 4-position dual 3-port valve Note) (C) 4 2 Note) Rubber seal only 1 5 3 N.C. N.O.

LEC-OM02904

A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.