Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: L4 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: B (Out 1: PNP; Out 2: PNP)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector)

Rated Flow Range: 0.1 to 10 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/8, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V, Lead Wire: w/M12 Conversion Lead Wire and Connector, 0.1m, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.1 to 10 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/8, Output Specification: Out 1: NPN; Out 2: Analog 4 to 20 mA, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.1 to 10 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/8, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

AC Servo Motor Driver (Pulse input type/Positioning type)

[PA06] [PA05]100P [PA07] Actuator lead L[mm] n1/n2 1 Ex.)

Serial Transmission System Series EX250 Series EX500

Seal 0 1 Metal seal Rubber seal 12 SI unit Serial Unit (SI Unit) Dimensions/EX250 DeviceNet PROFIBUS-DP CC-Link SI SI SI PW PW(V) RUN PWR(V) MOD/NET PWR(V) PWR STATION NO.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Rotary Actuator/Vane Type

V V V 100 V 93A Oilproof heavy-duty cord V V V M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V S79 V V v v IC circuit 3-wire (PNP) S7P V V v v Solid state auto switch Grommet Yes For 20, 30, 40 Oilproof heavy-duty cord Relay, PLC 2-wire 12 V T79 V V v v Connector T79C V V V

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

port S99 Heavy-duty cord 3-wire (NPN) Yes Yes Yes Yes No No Change threaded hole to through-hole S99V 5 V, 12 V For 10 and 15 Change the screw position S9P Relay, PLC 3-wire (PNP) IC circuit 24 V Grommet Change rotation range S9PV Change rotation range between 0 and 200 90 5 V, 12 V 5 V, 12 V, 24 V Parallel cord Change rotation range between 0 and 110 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

200 V, 12 V, 24 V, 48 V, 110 V, 220 V 240 V With surge voltage suppressor (S) (Grommet type) With light/surge voltage suppressor (Z) (Grommet terminal) (Conduit terminal) (DIN terminal) L plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector

VS 8-2/VS 8-4

There is a danger of malfunction or damage to the reduced wiring system or input/output equipment. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

Proposals for Energy Saving

(equivalent to UL-94 Standard V-0) Inner tube I.D.

ZB-OM00301

11.6mm 11.6 V () () ISO8573-12001JIS B8392-12003 2.4.3 2.5.3 2.6.3 15 - No.ZB-OM00301 () . 1 URL http://www.smcworld.com PV 12 KQ2S06-01SKQ2S04-01S 1/8PV 2~3 35Nm M5PVPD 1/6 11.5Nm / 16 - No.ZB-OM00301 V V V Assy V Assy V V Assy V Assy (2mm) V Assy 0.15Nm 0.15Nm 17 - No.ZB-OM00301 V Ass y V Assy V Assy ( ) V Assy 2 1V V Assy 2V Assy Assy 18 - No.ZB-OM00301 O Assy

Compact and Lightweight

Vacuum (V) and exhaust (E) port should not be sealed simultaneously.

ZSE30/ISE30

Maximum load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Minimum load impedance: 50 Reduce/Increase supply pressure to within the regulating pressure range. Applied pressure error Brown DC(+) Supply pressure is below the minimum regulating pressure.

XLAQ/XLDQ

I G L H A V V M A C U U Without indicator Flange side e Temperature specifications/Heater r Auto switch type Applicable flange size 25 40 50 Symbol Nil Auto switch part no.