Fittings & Tubing Air Cylinders Rotary Actuators Side tapped mounting [1/N1] Through-holes in open/close direction [2/N2] 4 x MM through Thread for mounting attachment C C B A 4 x H through Hole for mounting attachment S S O O B A (mm) (mm) MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 C 2 2.5 4 5 H 2.9 3.4 4.5 5.5 B 5.7 7 9 12 B 5.7 7 9 12 Model A 3 4 5 6 Model A 3 4 5 6 11221122112211221 N1
HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products REMOTE e [ENT] key Decides the settings. START/STOP [G] [H] key Moves the cursor and changes the setting values. RUN [E] key Moves the cursor. r A L A RM [REMOTE] indicator Lights up when the unit is in the remote status.
2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73
Contact SMC beforehand and take special consideration of A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Clean air, N2, Ar, CO2, Pure water Clean air, N2 IR-A Fluid Grade B Air, N2 Air, N2, Ar, CO2, Water Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Proof pressure 1.5 MPa Grade B IR Air, N2 Air, N2, Ar, CO2, Water Max. operating pressure 1.0 MPa Proof pressure 1.5 MPa Low pressure type High pressure type 0.02 to 0.2 MPa Max. operating pressure IRV Set pressure 1.0 MPa Low pressure
Connecting bracket A Filter body AMH AME w Loosen two hexagon socket head cap screws and remove the connecting bracket A. AMF Hexagon socket head cap screw ZFC e After removing the connecting bracket A, open the filter body, and take out the element. Note) Do not lose the connecting bracket. SF Connecting bracket B SFD r Assemble a new element on the filter body.
(RES) A.10 Undervoltage A.12 Memory error 1 (RAM) A.13 Clock error A.15 Memory error 2 (EEP-ROM) A.16 Encoder initial communication error1 A.17 Board error A.19 Memory error 3 (Flash-ROM) A.1A Motor combination error A.1C Software combination error A.1E Encoder initial communication error 2 A.1F Encoder initial communication error 3 A.20 Encoder normal communication error 1 A.21 Encoder normal
4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U Side D Side 3.1 8 36.3 43.7 5.5 (DIN rail dimension) 35 18 28.8 DIN rail holding screw Manual override DIN rail ( ) In case of locking type, turn after pushing in.
-2No.PF-OMS0001CN-A / 1 1.5 *3) 1 1 [] -3No.PF-OMS0001CN-A () () () N2 () -4No.PF-OMS0001CN-A () * * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMS0001CN-A * FG (49 N 9022545 ,IN () () -6No.PF-OMS0001CN-A * () 6 33 () 10 m DC(-)() -7No.PF-OMS0001CN-A * () () CE 050 -8No.PF-OMS0001CN-A * 1015 10 /23% 3 LCD * OUT -9No.PF-OMS0001CN-A
Caution for the use of fluids with high permeation When the Chemical Thermo-con is used for a fluid with high permeation into fluorine resin, the permeation can affect its life. If the fluid also generates corrosive gas, perform N2 supply and exhaust (N2 purge) inside the heat exchanger. 3.
Entry-Mounting 04 o4 Tube o a o 06 s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.
Entry-Mounting 04 o4 Tube o a o 06 s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.
sides) e (b) Lever D side (a) Bolt (Both sides) Replacement Parts No.
0 e e u u r !1 i r t !1 !0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No. Description Material Note Body Undercover Cover Plate Valve element A Valve element B Piston Return spring Valve seat Rod Parallel pin Pilot solenoid valve When the pilot operated solenoid valve !
-2No.PF-OMP0001CN-F / 1 1.5 *3) 1 1 [] -3No.PF-OMP0001CN-F () () () N2 () -4No.PF-OMP0001CN-F () * , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMP0001CN-F * FG (49 N ,IN () () -6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000
With air cushion WA 2-M5 x 0.8 Relief port GB 2-P (Rc, NPT, G) GA GA RA MM H1 RA 10 10 Width across flats B1 MM H1 W W Width across flats B1 D D MAX.WH MAX.WH E-0.05 0 E-0.05 0 I AL H + Stroke K A AL C0.1 KA A K F F 8-J S + Stroke H ZZ + 2 Stroke NA (mm) MM NA P RA S WA WH 20 20 20 A AL Bore size B1 C D E F GA H H1 I M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 J K KA M14 x 1.5
B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid pressure Fluid (Main piping) Operation Operating fluid temperature 0 to 3.5 MPa Coolant Note 2) 0 to 7.0 MPa External pilot solenoid/Air operated 5 to 60C Note 1)/5 to 60C Note 1)
Name plate [-N] VVQ1000-N2-Station (1 to Max. stations) P = 10.5 It is a transparent resin plate for placing a label that indicates solenoid valve function, etc.
Pilot valve symbol 200 AC 110 AC 220 AC 12 DC 100 AC 24 DC q K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y w e Nil r Nil Y t y Nil u Nil i Nil o Nil !0 Nil Combinations q to !