Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: 2 (OUT1: Analog 4 to 20mA)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

Best Pneumatics Vol. 14

r r u u u Drain Drain Drain Component Parts Material No.

Modular F.R.L. Unit

Note 2) Use a bushing (part no: 131368) when connecting R 1/8 pressure gauge to R 1/16 gauge port. Note 3) Not applicable to AW10. Accessory part no.

2

Example) AR30-03BG-1N-A r t w Made to Order (Refer to pages 187 and 188 for details.)

MXS Series Air Slide Table

MXS2020 0.015 MXS2050 MXS2040 MXS2010 0.010 MXS2030 MXS2020 MXS2010 0.01 0.02 0.005 100 200 300 0 0 0 100 200 300 160 120 80 40 240 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 25 25 25 Lr=154mm 0.040 0.07 0.05 MXS25-125 MXS25-150 MXS25-100 0.035 MXS25-150 MXS25-75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 0.06 MXS25-125 MXS25-100 MXS25-125 MXS25-150 MXS25-

Modular F.R.L. Unit

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

Air Slide Table Series MXQ

) 8 8 8 Lr = 70mm MXQ8-75 MXQ8-10 MXQ8-20 0.03 MXQ8-30 MXQ8-30 MXQ8-30 0.06 MXQ8-75 MXQ8-50 MXQ8-40 MXQ8-20 MXQ8-30 MXQ8-40 MXQ8-75 Table displacement mm Table displacement mm Table displacement mm 0.010 0.02 0.04 MXQ8-40 MXQ8-30 MXQ8-20 MXQ8-10 MXQ8-50 0.005 MXQ8-50 0.01 0.02 MXQ8-10 0 40 80 120 0 0 20 40 60 20 40 60 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

MGP

1/8 R 1/4 R 3/8 77 Series MGP Specific Product Precautions Operating Pressure Use the recommended pneumatic circuits.

Modular Type Regulator Series AR

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.