Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

0.4

) 22 20.5 7 Stations 1 2 3 n VFR D side U side ( 9.5) 45 65.5 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) VQ7 C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 B 2 (1.5) 37.5 A L n Dimensions Formula L1 = 22n + 24 n:

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

side: Orange 2(B) port side: Green 12.3 4 x 5.3 (For mounting) L2 5 (Rail mounting hole pitch: 12.5) L1 With option (Station n) (Station 1) Light/surge voltage suppressor 58.4 E 4 A 3/5 3/5 E 4 A 4 A 4 A 82.7 101.2 77.3 2 B 2 B 2 B 2 B 63.8 P 1 P 1 5 5 3 E 1 P 3 E 1 P 12 1 1 1 1 Individual SUP spacer (For DIN rail mounting) (10) Individual EXH spacer 14.7 L Dimension n: Stations L n 2 185.5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

2 3 Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) VQ1000 VQ2000 1 2 N R Note 5) With name plate External pilot VQ1000 VQ2000 Symbol C3 Note 1) C4 Note 1) C6 Note 1) C8 Note 1) M5 CM Note 2) Note 3) MM Note 4) Note 1) When two or more symbols are specified, indicate them alphabetically.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

2 3 Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) VQ1000 VQ2000 1 2 N R Note 5) With name plate External pilot VQ1000 VQ2000 Symbol C3 Note 1) C4 Note 1) C6 Note 1) C8 Note 1) M5 CM Note 2) Note 3) MM Note 4) Note 1) When two or more symbols are specified, indicate them alphabetically.

0.4

45 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n + 24 n: Station B B B 2 2 2 A A A 1 46 75 85.5 2 68 87.5 98 3 90 112.5 123 4 112 137.5 148 5 134 162.5 173 6 156

Series SV

(1 set) SV1200-5FU (2 sets) Single solenoid SV1100-5FU (4 sets) SS5V1-16PD1-06B-C6 . 1 set (manifold part no.)

VQZ1000/2000/3000

pressure release Manual override (For C6, C8) (5) 10.5 U side D side Stations 1 2 3 n ( 9.5) 45 65.5 ( 9.5) 22 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 7 (59.5) 58 20.5 Residual pressure release Manual override (33) (41.5) 1.5 C8: One-touch fitting assembly for 8 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 B B B 2 2 2

Series VQ Base Mounted Metal Seal/Rubber Seal

How to Order Manifold Option VV5Q 1 08 C6 U 1 1 N P Symbol Option VQ1000 VQ2000 Remarks None Check valve for prevention of back press.

SV

P 1 5 3 E 1 P (Station n) (Station 1) Light/Surge voltage suppressor 1 1 Individual SUP spacer SV3000-00Interface regulator Individual EXH spacer 82.7 77.3 63.8 SV3000-M1Interface regulator 12 (For DIN rail mounting) (10) B B B B 14.7 157.9 139.9 A A A A B A B A B A B A L Dimension n: Stations L n 2 185.5 175 121.5 17.5 97 3 198 187.5 142 13.5 117.5 4 223 212.5 162.5 16 138 5 235.5 225 183