Vacuum Regulator P601010-2 P601020-2 Valve assembly 2 HNBR, etc.
2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2
0 ZHP ZHP o ZU i VQD-V Replacement Parts/How to Order o!0 Plate assembly i Pad ZHP1 PL A 1 N ZP3E 80 BM Holder Pad material N NBR S Silicone rubber U Urethane rubber F FKM Size (Applicable pad dia./form) 1 63/80: Flat type, 63: Bellows type 2 80: Bellows type Plate Part number for a set of plate and holder Pad form !2 One-touch fitting (The order lot is 10 pieces.)
Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.
D type for 2 to 8 stations; No.10 SY3000-43-1A-10 One-touch fitting for1/4 VVQ1000-50A-N7 One-touch fitting for5/32 VVQ1000-51A-N3 One-touch fitting for1/4 VVQ1000-51A-N7 SY5000 One-touch fitting for5/16 VVQ1000-51A-N9 Note 1)P and R ports cannot be changed. Note 2)Use caution that O-rings must be free from scratches and dust. Otherwise, air leakage may result.
Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector
Specification SV2000 SV1000 SV4000 SV3000 Applicable series Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow
A third cross bar can be ordered separatey. irB-3cB) TK.2 3 6 ! v x 2 8 " d x 6 5 h TK-1 Tube Ctnler (13mm lubing or less) TK'2 TLbe Cder (18mm lubing or ess) TK-3 Tub euter (Low Coso TG 1 Tube Fe ease Too (o4. o6mm tube) TG-2 Tube Be ease Too (oiA o1r4'l!
Note 13) When option Y is selected, V for (4) exhaust sealing valve cannot be selected. -10No. ZKJ-OM00201-D 2.
DIN type 5 pins Number Description Function Description Function 2 SW+ Number 1 Sensor power supply + Open 2 3 4 For solenoid valve +24 V 1 SV24V N.C. 2 1 VQC 3 For solenoid valve 0 V 2 SV0V SW 3 Sensor power supply Protective ground 3 PE SIGNAL 4 Sensor input signal 4 1 5 5 SQ
voltage fluctuation 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 0.35 (With light: 0.4) DC Standard Power consumption (W) 0.1 (With light only) With power saving circuit 1.4 (With light: 1.5) 100 V 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 1.6 (With light: 1.7) [1.7 (With light: 1.8)] 110 V [115 V] 3 position closed center 3 position closed center Apparent power VA (B) 2 (A) 4 (B) 2 (A
circuit 0.35 (With light: 0.4) Power consumption (W) DC 0.1 (With light only) External pilot 1.4 (With light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With light: 1.7) [1.7 (With light: 1.8)] (A) 2 (A) 2 Apparent power (VA) AC X X 2.3 (With light: 2.4) 220 V [230 V] 2.5 (With light: 2.6) [2.7 (With light: 2.8)] 1 (P) 3 (R) 1 (P) 3 (R) Surge voltage suppressor Indicator
Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]
Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -
Nole 1 ) For rnetal sear iype onty Nole 2) V\hen speciryng mo tran one opton, enter symbos in a phabelca Nole 3) A opton nol ava labe 1or 4 pos tion dual3 portva!
single 1 4 Power saving circuit is not available for D, DO, Y, YO or W types. 10-SY9000 (A)4 2(B) 3 8 1 F2: With side bracket One-touch fitting (Metric size) 1 (P) (EA)5 3(EB) Symbol Port size Applicable series For DC 2 position double 4 One-touch fitting C4 10-SY3000 2(B) (A)4 5 24 VDC 6 12 VDC 6 One-touch fitting C6 2 4 One-touch fitting C4 (EA)5 1 (P) 3(EB) V 6 VDC 6 One-touch fitting
One-touch fitting for 4 C4 2 position double SY3000 One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 For DC One-touch fitting for 6 C6 SY5000 5 24 VDC 6 12 VDC One-touch fitting for 8 C8 SY9000 has no bracket.
Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: V (Panel Mount Adapter for w/Flow Adjustment Valve)
Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for w/Flow Adjustment Valve
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N7 (1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)