ZSE40/ISE40

SET [N] H (Fixed hysteresis) = 3 digits H H ON ISA2 Window comparator mode OFF OUT1: Selection of the output mode NO n-1 n-2 IS High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) ZSM Auto Preset (For adsorption confirmation) PF2 1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1 IF Data SET Press the SET button.

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: 6.35(1/4inch), Liquid contact parts material: Resin + Metal, Mounting Hole: Presence

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Bottom, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Table of Contents

color 76 41.5 29.5 12 3.2 12 14.2 L type: Black color 76 41.5 29.5 12 3.2 12 14.2 1 8 82 44.5 30.5 12 4.2 12 17.2 86 44.5 30.5 12 4.2 12 17.2 94.5 54 39 14 4.2 17 19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc

Table of Contents

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Speed regulation range (s/90) CRB1 0.082 J 0.12 J 0.398 J 0.6 J 0.112 J 0.16 J 0.54 J 0.811 J Allowable kinetic energy 245 N 390 N 490 N 588 N 245 N 390 N 490 N 588 N Allowable radial load Shaft load MSU 196 N 340 N 490 N 539 N 196 N 340 N 490 N 539 N Allowable thrust load Bearing Bearing CRJ Side ported or Axial ported Port location Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Side ported CRA1 Size Rc 1/

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

VK300

-42Stations -C4, C6 (Pitch) 2 x 4.5 Manual override (Non-locking) (Mounting hole) 300 (Lead wire length) 4 x Rc 1/8 (P, R port) (Station n) (Station 1) 300 (Lead wire length) 2 x 4.5 VV061 Max.5.5 (Pitch) (Mounting hole) Manual override (Non-locking) VV100 V100 (Station 1) (Station n) S070 (Pitch) n x Rc 1/8 (A port) VQD VQD-V (Pitch) n x One-touch fitting C4: Applicable tubing T0425 C6:

VQ7-6/7-8

(B), 4 (A) Applicable solenoid valve Manifold block size Weight kg Stations 1 (P), 3 (R2) 5 (R1) port size Piping direction Size Rc1/4 Rc3/8 C6 (for 6) C8 (for 8) C10 (for 10) Note) Right, Left Rc1/4 Rc3/8 C12 (for 12) ISO size 1 VQ7-6 ISO size 1 series 0.43n + 0.49 (n: Stations) 10 stations max.

VK300

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

Title not found

(800) 526-7661 1/4 NPT Male Thread to Tube 1/4 Male Pipe Thread to Tube not shown not shown 9 16 Hex Typ. 31/32 31/32 3 4 Typ. 1-3/32 1-1/8 1-1/4 9 32 1 1-1/16 44 1/4 B2 1/2 1/4 B2 1/4 B4 1/4 B6 1/4 B3 1/4 B1 1/4 B5 1/4 B8 1/4 B3 1/2 1/4 Male Pipe Straight Manifolds Top View Top View #1 Barb P/N 1/4 B1 x 2 1/4 B1 x 3 1/4 B1 x 4 1/4 B1 x 5 1/4 B1 x 6 1/4 B1 x 7 #2 Barb P/N 1/4

4/5 Port Air Operated Valve Series SYJA3000 1

type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 3 position

4/5 Port Air Operated Valve SYJA3000 Series

VGA Port size Symbol Body ported Thread type VPA Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 2 position single 2 position double 1/8 With sub-plate 01 F N T VPA3 2(B) (A)4 2(B) (A)4 3 position closed center 3 position exhaust center (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position