Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: Without calibration certificate, Flow rate control valve: Available, Custom-made Specifications: None, Rating Flow Range(L/min): 1 to 50 (25), Accessory: None, Option: None, Analog Current Output(mA): 4 to 20

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Compact Manifold Regulator

A ARP w y IR-A IR r IRV i VEX SRH !

Compact manifold regulator ARM5 Series

SRP Note) A pressure gauge with a full span of 0.8 MPa is attached. SRF Symbol Relieving type Non-relieving type ITV IN IN 1 1 IC OUT OUT 2 2 ITVH OUT OUT 2 2 ITVX Note) A standard model is equipped with a backflow function. A main valve opens when the inlet pressure is released, and then an outlet pressure backflows into the inlet side.

ARM10/11

R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

ARM10/11

R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

EXH SS5Y7-20 1/4 C10 3.60 0.93 0.88 0.27 3.60 0.93 2 to 20 (1) Valve stations Note) Values for 5 stations manifold with a 2 position single type valve. 4/2 (A/B) Location Valve 1,3,5 (P,EA,EB) Port 1/4 1/8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) Port size 4,2 (A,B) Port Manifold

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Table of Contents

valve supply pressure port) ZCU AMJ Filter block Spacer A Valve unit Release flow adjustment needle 2-4.2 (Mounting hole) Misc. 2 Rc 1/8 PV port (Air supply pressure port) 2 1 Adapter G Bracket A Bracket A Rc 1/8 V port (Vacuum pad connection port) 10.2 ZR100-K1MD1 D2 D3 A B SMC PRESSURE SWITCH VJ3233-X17 PRESS. 2.5~7kgf/cm2 SOL.a SOL.b A B RESET SET A B + + + Digital pressure switch 85

Table of Contents

For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) For 100 (Top view from long shaft side) For 90 (Top view from long shaft side) A port B port A port B port A port B port A port B port (Long shaft side) (Long shaft side) (Long shaft side) !83 e i e i u !2 u !2 w !4 w !7 !6 Internal rubber bumper q !4 q !0 Internal rubber bumper !1 !1 o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) For 100 (Top view from long shaft side) For 90 (Top view from long shaft side) A port B port A port B port A port B port A port B port (Long shaft side) (Long shaft side) (Long shaft side) !83 e i e i u !2 u !2 w !4 w !7 !6 Internal rubber bumper q !4 q !0 Internal rubber bumper !1 !1 o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) For 100 (Top view from long shaft side) For 90 (Top view from long shaft side) A port B port A port B port A port B port A port B port (Long shaft side) (Long shaft side) (Long shaft side) !83 e i e i u !2 u !2 w !4 w !7 !6 Internal rubber bumper q !4 q !0 Internal rubber bumper !1 !1 o !

CRB2/CRBU2/CRB1

B port A port 2-1> B port A port B port A port Clockwise Clockwise CRB1 Free-Mounting Type CRBU2 CRB2 Hatched area represents a stopper lever.

VK300

Flow rate characteristics Flow Rate Characteristics/Weight VV100 Weight (g) 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Operating pressure range (MPa) Port size Valve model C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] V100 Grommet b Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13