VS 8-2/VS 8-4

VV801 M5 Tightening torque 2.3 to 3.7 Nm VV802 M4 Tightening torque 1 to 1.4 Nm Mounting screw Silencer cover External pilot Internal pilot D-side end plate Rivet Port plug Thread size, type Part no.

MXW Series Long Stroke Slide Table

100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through

5 Port Solenoid Valve

x 0.8 Ground screw 117 VQ7 B 2 B 2 B 2 B 2 B 2 B 2 B 2 0 19 3 1 69 55.5 53.7 60 12 X 51 1 4 A 4 A 4 A 4 A 4 A 4 A 4 A 17 22 Communication connector C2 (M12 Male thread) 15.5 34 69.5 34.5 1/2" 1(P) port 48 3/8", 1/2" 4(A), 2(B) port 1/8" External pilot port 68.5 Note) The dimensions of the bottom ported type are common to all S kits.

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

CV/MVGQ

Description Material 32 PDU-12LZ 40 NBR 20 PDU-8Z 25 Rod seal PDU-10Z PDU-14LZ #4 How to order solenoid valves VZ319Voltage Electrical entry 10-15-35 Series CVM3 Basic Style (B) Single acting, Spring return: CVM3B S Bore size Stroke M5 x 0.8 Width across flats B2 Manual override Width across flats B1 S + Stroke ZZ + Stroke Single acting, Spring extend: CVM3B T Bore size Stroke H + Stroke

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

x 0.8 75 09.5 25 2 14.0 37 07.4 M5 x 0.8 07.5 095 05.5 27.5 061 08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model MY3A16 MY3A25 MY3A40 MY3A63 4.0 110 42 30 6.5 7 19 102 4.0 32.5 26 44 43 17.2 8 22.5 M5 x 0.8 Rc, NPT, G1/8 Rc, NPT

Large Type Vacuum Unit Series ZR

Manual operation C2 Air operated C3 N.O. Nil Non-locking push type C4 Double SOL.

PSxx-OMG0005CN

PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple -

Compact Vacuum Unit Ejector/ Vacuum Pump System

M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

Precautions 1

To operate the cylinder at these values, prevent dust from entering by installing an AN120-M5 silencer on the EXH port.

HRX-OM-X084

Use M5,M6 screws (bolts) or equivalent to the fix the product. Do not drag this product after mounting, as the feet may be damaged. (option -Y) 2. In the case of air cooling type, this product sucks air from the front and discharges it to the back. Please do not block the suction and the discharge air. Please do not install in a sealed place.

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series 3 5 Thread type Nil F N T 3000 5000 Rc G NPT NPTF Pilot type Nil R A, B port size Thread piping Symbol Port size M5 01 Except M5 Internal pilot External pilot Option for mounting Nil 1 Applicable series SY3000 SY5000 M5 x 0.8 1/8 Standard (Valve mounting screw not

ZB-OM00301

M5 Q1 +COM N.C.

EX500-GPR1A.eng

To the communication connector ( C2 ) or ( 1 ) of SI unit, connect the branch cable with M12 connector from GW. To the communication connector ( C1 ) or ( 0 ), connect the branch cable with M12 connector from Input unit. To the communication connector of Input unit, connect the branch cable with M12 connector from SI unit.

Sensor Range: 0 [Positive Pressure (0~1MPa)], Accuracy: A (±1%F.S.), Port Size: M5X0.8

Sensor Range: 0 [Positive Pressure (0~1MPa)], Accuracy: ±1%F.S., Port Size: M5X0.8, Option: -

Electric Actuator

Vibration, Noise L A L Model Bolt (mm) (mm) # Items for internal check LEJ;40 LEJ;63 M5 M6 5.5 6.8 36.5 49.5 1. Lubricant condition on moving parts. For lubrication, use lithium grease No. 2. Workpiece fixed 2. Loose or mechanical play in fixed parts or fixing screws.

Air Fittings & Tubing

<M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.

Air Cylinder

-RN 14.5 M10 x 1 Cover side (Head side) Piping port 2 x M5 x 0.8 5 6 M5 x 0.8 20 20.3 18.3 0 0.3 19 20 2.3 2 x 5.5 Mounting hole 18.3 0 0.3 9.5 15 8 21 33 55.5 + Stroke 28 42 Cover outside diameter 83.5 + Stroke With head end lock: ClBJ2F16-HN 6 2 x M10 x 1 Cover side (Rod side) Piping port 2 x M5 x 0.8 8 5 20 M5 x 0.8 19.8 18.3 0 0.3 20 19 2 x 5.5 Mounting hole 12.5 2.3 18.3 0 0.3 8 12.5

Rotary Actuator/Vane Type

x 0.8 24.5 10.5 50.5 59 22 14 21 30 50 40 13 22 80.005 0.020 16 0 0.043 5 2 8 12 1.0 26 14 43 M5 x 0.8 depth 18 16.5 M5 x 0.8 depth 10 M5 x 0.8 34.5 14 64 75 24 15.5 25 40 63 45 15 30 100.005 0.020 25 0 0.052 6.5 4.5 9 20 1.0 31 20 56 M5 x 0.8 depth 16 17.5 M5 x 0.8 depth 10 M5 x 0.8 39.8 17 79.5 90 30 21 31.6 57 B CRB2 Series Dimensions: Standard Type 10 Double vane Following figures show