Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(If not specifying dimension C2, indicate instead.)

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

Electric Actuators

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.

Electric Actuator/Slider Type

Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Leakage current 100 A or less at 24 VDC 0.8 mA or less Indicator light Red LED lights up when turned ON.

CXS

36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

SFOD-OMT0009CN

-COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF Auto switch model D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Electrical entry direction In-line Perpendicular In-line Perpendicular In-line Perpendicular LEJ LEJ Wiring type 2-wire 3-wire NPN PNP Output type LEL Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) LEM Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC

Environment

1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.

CJP

Please order a seal kit with each part number of tube bore size. 6-2-10 5 Series CJP Pin Cylinder Single Acting, Single Return Basic Style CJPB 2-M5 x 0.8 2-M3 (For mounting auto switch) CJ1 CJP CJ2 6 = C2, 10 = C2.5 B' Without rod end thread (Width across flats) Auto switch Rod end nut (Refer to page 6-2-13.) CM2 15 = C3 CG1 Mounting nut (Refer to page 6-2-13.)

CJP

Please order a seal kit with each part number of tube bore size. 6-2-10 5 Series CJP Pin Cylinder Single Acting, Single Return Basic Style CJPB 2-M5 x 0.8 2-M3 (For mounting auto switch) CJ1 CJP CJ2 6 = C2, 10 = C2.5 B' Without rod end thread (Width across flats) Auto switch Rod end nut (Refer to page 6-2-13.) CM2 15 = C3 CG1 Mounting nut (Refer to page 6-2-13.)

Slider Type Ball Screw Drive/11-LEFS Series

950 1000 Product weight [kg] 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33 7.61 7.89 8.17 8.45 8.75 9.01 9.29 9.57 9.85 10.13 Additional weight with lock [kg] 0.53 517 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS16 (72) ( ) +0.025 0 3H9 depth 3 40 Body mounting Note 1) reference plane 4 x M4 x 0.7 thread depth 6.4 24 28

LC6D/LC6C

Power supply Teaching Box Positioning Driver 24VDC 10%, Max. 3.0A 28 patterns Number of position settings LC6C Setting with dedicated teaching box (LC5-1-T1-02) Position setting method Absolute and incremental moves Speed: 6 to 200mm/s (with lead screw lead of 12mm) Position control method Photo coupler input 24VDC, Max. 6mA Input signal capacity To power supply Photo coupler output Max.